Wide-range RF variable inductor on Si CMOS chip with MEMS actuator

Conference Proceedings- European Microwave Conference

Volumn 2, Issue , 2004, Pages 701-704

  Sugawara, Hirotaka ^a   Yoshihara, Yoshiaki ^a   Ito, Hiroyuki ^a   Okada, Kenichi ^a   Masu, Kazuya ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRODES; MAGNETIC FIELDS; MAGNETIC FLUX; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; SILICON; VARIABLE FREQUENCY OSCILLATORS;

CMOS RF CIRCUITS; MULTI-BAND VCO; SILICON CMOS CHIPS; VARIABLE INDUCTORS;

ELECTRIC INDUCTORS;

EID: 18744403763     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, and A. Shimokohbe, "On-chip variable inductor using microelectromechanical systems technology," Jpn. J. Appl. Phys., vol. 42, no. 4B, pp. 2190-2192, Apr. 2003.
2. W. C. Tang, M. G. Lim, and R. T. Howe, "Electrostatic comb drive levitation and control method," IEEE J. Microelectromechanical Systems, vol. 1, no. 4, pp. 170-178, Dec. 1992.
3. V. M. Lubecke and J. C. Chiao, "MEMS technologies for enabling high frequency communications circuit," in The IEEE 4th Int. Conf. on Telecommunications in Modem Satellite, Cable and Broadcasting Services, vol. 2, Nis, Yugoslavia, Oct. 1999, pp. 382-389.
4. M. Danesh, J. R. Long, R. A. Hadaway, and D. L. Harame, "A Q-factor enhancement technique for MMIC inductors," in Proc. IEEE Int. Microwave Symp. and RFIC Symp., Baltimore, MD, June 1998, pp. 217-220.
5. R. L. Bunch, D. I. Sanderson, and S. Raman, "Quality factor and inductance in differential IC implementations," IEEE Microwave Magazine, June 2002.
6. Y. Yoshihara, H. Sugawara, H. Ito, K. Okada, and K. Masu, "Wide tunable LC-VCO using variable inductor," in Proc. Workshop on Wireless Circuits and Systems, Vancouver, B.C., Canada, May 2004, pp. 29-30.