A tunable RF MEMS inductor

Proceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Volumn , Issue , 2004, Pages 636-638

  Zine El Abidine, I ^a   Okoniewski, M ^a   McRory, J G ^a  

^a UNIVERSITY OF CALGARY   (Canada)

Author keywords

Inductor; MEMS; Radio frequency; Tunable

Indexed keywords

ADHESION; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; RESONANCE; SCANNING ELECTRON MICROSCOPY; SIGNAL INTERFERENCE; SILICON WAFERS; TUNING;

CAVITY DEPTH; QUALITY FACTOR; RADIO FREQUENCIES; TUNABLE;

ELECTRIC INDUCTORS;

EID: 16244369472     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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