A MEMS-based coriolis mass flow sensor for industrial applications

IEEE Transactions on Industrial Electronics

Volumn 56, Issue 4, 2009, Pages 1066-1071

  Smith, Richard ^a   Sparks, Douglas R ^a   Riley, Diane ^a   Najafi, Nader ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

Coriolis; Flow sensor; Microelectromechanical systems (MEMS); Sensory aids; Silicon

Indexed keywords

CONVENTIONAL STEELS; CORIOLIS; CORIOLIS MASS FLOWMETERS; EXTERNAL VIBRATIONS; FLOW SENSOR; FLOW-RATE; FLUID DENSITIES; GLASS SUBSTRATES; MASS FLOW RATES; MASS FLOW SENSORS; MICRO ELECTRO MECHANICALS; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED FLOW SENSORS; SENSOR OUTPUTS; SHOCK AND VIBRATIONS; SILICON TUBES;

CHROMATOGRAPHIC ANALYSIS; COMPOSITE MICROMECHANICS; INDUSTRIAL APPLICATIONS; MASS TRANSFER; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; SENSORY AIDS;

SENSORS;

EID: 65549167499     PISSN: 02780046     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIE.2008.926703     Document Type: Conference Paper

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