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Journal of the Korean Physical Society

Volumn 57, Issue 61, 2010, Pages 1811-1815

Optical, electrical, and structural properties of ultrathin Zirconium-oxide films

(6) Lee, Seungjo a Kang, Bosoo a Lee, Sangyuk a Jeong, Heejun a An, Ilsin a Song, Chulgi b

a Hanyang University (South Korea)

b SAMSUNG Electronics (South Korea)

Author keywords

Annealing; Ellipsometry; High k; Tauc Lorentz

Indexed keywords

EID: 78650356453 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: 10.3938/jkps.57.1811 Document Type: Article

Times cited : (6)

References (14)

1
- 34247897179
- E. Atanassova and A. Paskaleva, Microelectron. Reliab. 47, 913 (2007).
- (2007) Microelectron. Reliab. , vol.47 , pp. 913
- Atanassova, E.¹ Paskaleva, A.²

2
- 24144434278
- D. Lim and R. Haight, J. Vac. Sci. Technol., B 23, 201 (2005).
- (2005) J. Vac. Sci. Technol., B , vol.23 , pp. 201
- Lim, D.¹ Haight, R.²

3
- 0037959796
- S. Lee, H. Kim, P. McIntyre, K. Saraswat and J. Byun, Appl. Phys. Lett. 82, 2874 (2003).
- (2003) Appl. Phys. Lett. , vol.82 , pp. 2874
- Lee, S.¹ Kim, H.² McIntyre, P.³ Saraswat, K.⁴ Byun, J.⁵

4
- 28044447824
- E. Gerritsen, N. Emonet, C. Caillat, N. Jourdan, M. Piazza, D. Fraboulet, B. Boeck, A. Berthelot, S. Smith and P. Mazoyer, Solid-State Electron. 49, 1767 (2005).
- (2005) Solid-State Electron. , vol.49 , pp. 1767
- Gerritsen, E.¹ Emonet, N.² Caillat, C.³ Jourdan, N.⁴ Piazza, M.⁵ Fraboulet, D.⁶ Boeck, B.⁷ Berthelot, A.⁸ Smith, S.⁹ Mazoyer, P.¹⁰

5
- 34547296613
- S. Maikapa, T. Y. Wang, P.-J. Tzeng, C. H. Lin, T. C. Tien, L. S. Lee, J. R. Yang and M. J. Tsai, Appl. Phys. Lett. 90, 262901 (2007).
- (2007) Appl. Phys. Lett. , vol.90 , pp. 262901
- Maikapa, S.¹ Wang, T.Y.² Tzeng, P.-J.³ Lin, C.H.⁴ Tien, T.C.⁵ Lee, L.S.⁶ Yang, J.R.⁷ Tsai, M.J.⁸

6
- 24144473947
- J. Y. Seo, K. J. Lee, S. Y. Lee, S. J. Hwang and C. K. Yoon, Microelectron. Reliab. 45, 1360 (2005).
- (2005) Microelectron. Reliab. , vol.45 , pp. 1360
- Seo, J.Y.¹ Lee, K.J.² Lee, S.Y.³ Hwang, S.J.⁴ Yoon, C.K.⁵

7
- 39549085552
- (in Montreux, September 19-21)
- H. J. Cho et al., in Proceeding of the The 36th European Solid-State Device Research Conference (Montreux, September 19-21, 2006), p. 146.
- (2006) Proceeding of the The 36th European Solid-State Device Research Conference , pp. 146
- Cho, H.J.¹

8
- 20844433675
- S. Sayan, N. V. Nguyen, J. Ehrstein, T. Emge, E. Garfunkel, M. Croft, X. Zhao, D. Vanderbilt, I. Levin, E. P. Gusev, H. Kim and P. J. Mclntyre, Appl. Phys. Lett. 86, 152902 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 152902
- Sayan, S.¹ Nguyen, N.V.² Ehrstein, J.³ Emge, T.⁴ Garfunkel, E.⁵ Croft, M.⁶ Zhao, X.⁷ Vanderbilt, D.⁸ Levin, I.⁹ Gusev, E.P.¹⁰ Kim, H.¹¹ McLntyre, P.J.¹²

9
- 34547400989
- C. Y. Ma, F. Lapostolle, P. Briois and Q. Y. Zhang, Appl. Surf. Sci. 253, 8718 (2007).
- (2007) Appl. Surf. Sci. , vol.253 , pp. 8718
- Ma, C.Y.¹ Lapostolle, F.² Briois, P.³ Zhang, Q.Y.⁴

10
- 27944470896
- L. Q. Zhu, Q. Fang, G. He, M. Liu and L. D. Zhang, Nanotechnology 16, 2865 (2005).
- (2005) Nanotechnology , vol.16 , pp. 2865
- Zhu, L.Q.¹ Fang, Q.² He, G.³ Liu, M.⁴ Zhang, L.D.⁵

11
- 33847388797
- F. Ferrieu, K. Dabertrand, S. Lhostis, V. Ivanova, E. Martinez, C. Licitra and G. Rolland, J. Non-Cryst. Solids 353, 658 (2007).
- (2007) J. Non-Cryst. Solids , vol.353 , pp. 658
- Ferrieu, F.¹ Dabertrand, K.² Lhostis, S.³ Ivanova, V.⁴ Martinez, E.⁵ Licitra, C.⁶ Rolland, G.⁷

12
- 0038109976
- E. Bonera, G. Scarel and M. Fanciulli, J. Non-Cryst. Solids 322, 105 (2003).
- (2003) J. Non-Cryst. Solids , vol.322 , pp. 105
- Bonera, E.¹ Scarel, G.² Fanciulli, M.³

13
- 0004040706
- (Academic Press, New York)
- E. D. Pelik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985).
- (1985) Handbook of Optical Constants of Solids
- Pelik, E.D.¹

14
- 0001524926
- G. E. Gellison, Jr. and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 371
- Gellison Jr., G.E.¹ Modine, F.A.²

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