Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 389-397

  Sehr, H ^a   Evans, A G R ^a   Brunnschweiler, A ^a   Ensell, G J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; MICROACTUATORS; MICROMACHINING; SILICON SENSORS; THERMOELASTICITY;

THERMALLY ACTUATED VERTICAL BIMORPH SCANNERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033703688     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)