Electron stimulated desorption of cations from SiCl4 multilayers adsorbed on Si(1 1 1)

Surface Science

Volumn 593, Issue 1-3, 2005, Pages 173-179

  Lane, Christopher D ^a   Shepperd, Kristin R ^a   Aleksandrov, Alex B ^a   Orlando, Thomas M ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electron stimulated desorption (ESD); Silicon tetrachloride; Thermal desorption spectroscopy

Indexed keywords

DESORPTION; ELECTRONS; IONIZATION; MULTILAYERS;

ELECTRON-STIMULATED DESORPTION (ESD); SILICON TETRACHLORIDE; THERMAL DESORPTION SPECTROSCOPY (TDS);

SILICON COMPOUNDS;

EID: 26444434886     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2005.06.058     Document Type: Conference Paper

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