-
1
-
-
0024606669
-
-
S. Kanazawa, M. Kogoma, S. Okazaki, and T. Moriwaki: Nucl. Intsrum. Methods Phys. Res., Sect. B 37-38 (1989) 842.
-
(1989)
Nucl. Intsrum. Methods Phys. Res., Sect. B.
, vol.37-38
, pp. 842
-
-
Kanazawa, S.1
Kogoma, M.2
Okazaki, S.3
Moriwaki, T.4
-
2
-
-
0036465647
-
-
G. R. Nowling, S. E. Babayan, V. Jankovic, and R. F. Hicks: Plasma Sources Sci. Technol. 1 1 (2002) 97.
-
(2002)
Plasma Sources Sci. Technol.
, vol.1
, Issue.1
, pp. 97
-
-
Nowling, G.R.1
Babayan, S.E.2
Jankovic, V.3
Hicks, R.F.4
-
4
-
-
0032306958
-
-
A. Schutze, J. Y. Jeong, S. E. Babayan, J. Park, G. S. Selwyn, and R. F. Hicks: IEEE Trans. Plasma Sci. 2 6 (1998) 1685.
-
(1998)
IEEE Trans. Plasma Sci.
, vol.2
, Issue.6
, pp. 1685
-
-
Schutze, A.1
Jeong, J.Y.2
Babayan, S.E.3
Park, J.4
Selwyn, G.S.5
Hicks, R.F.6
-
6
-
-
7244242196
-
-
R. E. J. Sladek, E. Stoffels, R. Walraven, P. J. A. Tielbeek, and R. A. Koolhoben: IEEE Trans. Plasma Sci. 3 2 (2004) 1540.
-
(2004)
IEEE Trans. Plasma Sci.
, vol.3
, Issue.2
, pp. 1540
-
-
Sladek, R.E.J.1
Stoffels, E.2
Walraven, R.3
Tielbeek, P.J.A.4
Koolhoben, R.A.5
-
7
-
-
18844424704
-
-
M. Teschke, J. Kedzierski, E. G. Finantu-Dinu, D. Korzec, and J. Engemann: IEEE Trans. Plasma Sci. 3 3 (2005) 310.
-
(2005)
IEEE Trans. Plasma Sci.
, vol.3
, Issue.3
, pp. 310
-
-
Teschke, M.1
Kedzierski, J.2
Finantu-Dinu, E.G.3
Korzec, D.4
Engemann, J.5
-
11
-
-
0042362205
-
-
H. Yoshiki, K. Ikeda, A. Wakaki, S. Togashi, K. Taniguchi, and Y. Horiike: Jpn. J. Appl. Phys. 4 2 (2003) 4000.
-
(2003)
Jpn. J. Appl. Phys.
, vol.4
, Issue.2
, pp. 4000
-
-
Yoshiki, H.1
Ikeda, K.2
Wakaki, A.3
Togashi, S.4
Taniguchi, K.5
Horiike, Y.6
-
13
-
-
0032138693
-
-
J. Y. Jeong, S. E. Babayan, V. J. Tu, J. Park, I. Henins, R. F. Hicks, and G. S. Selwyn: Plasma Sources Sci. Technol. 7 (1998) 282.
-
(1998)
Plasma Sources Sci. Technol.
, vol.7
, pp. 282
-
-
Jeong, J.Y.1
Babayan, S.E.2
Tu, V.J.3
Park, J.4
Henins, I.5
Hicks, R.F.6
Selwyn, G.S.7
-
14
-
-
33845962247
-
-
J. Benedikt, K. Focke, A. Yanguas-Gil, and A. von Keudell: Appl. Phys. Lett. 8 9 (2006) 251504.
-
(2006)
Appl. Phys. Lett.
, vol.8
, Issue.9
, pp. 251504
-
-
Benedikt, J.1
Focke, K.2
Yanguas-Gil, A.3
Von Keudell, A.4
-
18
-
-
53349118411
-
-
K.-D. Weltmann, R. Brandenburg, T. von Woedtke, J. Ehlbeck, R. Foest, M. Stieber, and E. Kindel1: J. Phys. D 4 1 (2008) 194008.
-
(2008)
J. Phys. D
, vol.4
, Issue.1
, pp. 194008
-
-
Weltmann, K.-D.1
Brandenburg, R.2
Von Woedtke, T.3
Ehlbeck, J.4
Foest, R.5
Stieber, M.6
Kindel, E.7
-
21
-
-
34249018565
-
-
T. Nozaki, K. Sasaki, T. Ogino, D. Asahi, and K. Okazaki: Nanotechnology 1 8 (2007) 235603.
-
(2007)
Nanotechnology
, vol.1
, Issue.8
, pp. 235603
-
-
Nozaki, T.1
Sasaki, K.2
Ogino, T.3
Asahi, D.4
Okazaki, K.5
-
23
-
-
45749102852
-
-
T. L. Ni, F. Ding, X. D. Zhu, X. H. Wen, and H. Y. Zhou: Appl. Phys. Lett. 9 2 (2008) 241503.
-
(2008)
Appl. Phys. Lett.
, vol.9
, Issue.2
, pp. 241503
-
-
Ni, T.L.1
Ding, F.2
Zhu, X.D.3
Wen, X.H.4
Zhou, H.Y.5
-
25
-
-
57649101082
-
-
Y. Ito, K. Urabe, M. Kubo, and K. Tachibana: Proc. 18th Int. Symp. Plasma Chemistry, 2007, p. 173.
-
(2007)
Proc. 18th Int. Symp. Plasma Chemistry
, pp. 173
-
-
Ito, Y.1
Urabe, K.2
Kubo, M.3
Tachibana, K.4
-
27
-
-
78650094303
-
-
Y. Ito, Y. Fukui, K. Urabe, O. Sakai, and K. Tachibana: Jpn. J. Appl. Phys. 4 9 (2010) 066201.
-
(2010)
Jpn. J. Appl. Phys.
, vol.4
, Issue.9
, pp. 066201
-
-
Ito, Y.1
Fukui, Y.2
Urabe, K.3
Sakai, O.4
Tachibana, K.5
-
29
-
-
24944481803
-
-
J. Kedzierski, J. Engemann, M. Teschke, and D. Kerzec: Solid State Phenom. 10 7 (2005) 119.
-
(2005)
Solid State Phenom
, vol.10
, Issue.7
, pp. 119
-
-
Kedzierski, J.1
Engemann, J.2
Teschke, M.3
Kerzec, D.4
-
31
-
-
63749121583
-
-
N. Mericam-Bourdet, M. Laroussi, A. Begum, and E. Karakas: J. Phys. D 4 2 (2009) 055207.
-
(2009)
J. Phys. D
, vol.4
, Issue.2
, pp. 055207
-
-
Mericam-Bourdet, N.1
Laroussi, M.2
Begum, A.3
Karakas, E.4
-
34
-
-
77149152779
-
-
K. Urabe, T. Morita, K. Tachibana, and B. N. Ganguly: J. Phys. D 4 3 (2010) 095201.
-
(2010)
J. Phys. D
, vol.4
, Issue.3
, pp. 095201
-
-
Urabe, K.1
Morita, T.2
Tachibana, K.3
Ganguly, B.N.4
-
35
-
-
21144432955
-
-
T. Somekawa, T. Shirafuji, O. Sakai, K. Tachibana, and K. Matsunaga: J. Phys. D 3 8 (2005) 1910.
-
(2005)
J. Phys. D
, vol.3
, Issue.8
, pp. 1910
-
-
Somekawa, T.1
Shirafuji, T.2
Sakai, O.3
Tachibana, K.4
Matsunaga, K.5
-
38
-
-
78650094753
-
-
Theory of Ionized Gases Denki Gakkai, Tokyo, in Japanese
-
S. Otori, T. Sekiguchi, and T. Kono: Denri Kitairon (Theory of Ionized Gases) (Denki Gakkai, Tokyo, 1969) p. 171 [in Japanese].
-
(1969)
Denri Kitairon
, pp. 171
-
-
Otori, S.1
Sekiguchi, T.2
Kono, T.3
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