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Volumn 42, Issue 6 B, 2003, Pages 4000-4003
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Localized plasma processing of materials using atmospheric-pressure microplasma jets
b
Uzen Parts
(Japan)
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Author keywords
Atmospheric pressure; He SF6 O2 gas mixture; Localized Si etching; Microplasma Jets; RF corona discharge; Surgical needle
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Indexed keywords
ATMOSPHERIC PRESSURE;
ELECTRODES;
ETCHING;
NEEDLES;
STAINLESS STEEL;
SURGICAL EQUIPMENT;
CORONA DISCHARGES;
PLASMAS;
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EID: 0042362205
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.4000 Document Type: Conference Paper |
Times cited : (31)
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References (8)
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