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Volumn 42, Issue 6 B, 2003, Pages 4000-4003

Localized plasma processing of materials using atmospheric-pressure microplasma jets

Author keywords

Atmospheric pressure; He SF6 O2 gas mixture; Localized Si etching; Microplasma Jets; RF corona discharge; Surgical needle

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRODES; ETCHING; NEEDLES; STAINLESS STEEL; SURGICAL EQUIPMENT;

EID: 0042362205     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.4000     Document Type: Conference Paper
Times cited : (31)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.