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Volumn 26, Issue 10-11, 2006, Pages 2165-2168
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Microwave dielectric properties of BaTi4O9 thin film
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Author keywords
BaTi4O9; Capacitors; Dielectric properties; Films; Microstructure
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Indexed keywords
BARIUM TITANATE;
CAPACITORS;
DIELECTRIC LOSSES;
DIELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
PERMITTIVITY;
RAPID THERMAL ANNEALING;
THIN FILMS;
CIRCULAR PATCH CAPACITOR (CPC);
MICROWAVE DIELECTRIC PROPERTIES;
CERAMIC MATERIALS;
BARIUM TITANATE;
CAPACITORS;
CERAMIC MATERIALS;
DIELECTRIC LOSSES;
DIELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
PERMITTIVITY;
RAPID THERMAL ANNEALING;
THIN FILMS;
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EID: 33645547626
PISSN: 09552219
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jeurceramsoc.2005.09.089 Document Type: Conference Paper |
Times cited : (10)
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References (13)
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