Highly oriented c-axis 23° tilted ZnO films with high quasi-shear mode electromechanical coupling coefficients

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1229-1232

  Matsuo, Takuya ^a   Yanagitani, Takahiko ^b   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a  

^a DOSHISHA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

C axis tilted ZnO film; Quasi shear electromechanical coupling coefficient; RF magnetron sputtering technique

Indexed keywords

ELECTROMECHANICAL COUPLING; ULTRASONICS; ZINC OXIDE;

C -AXIS; C-AXIS-TILTED ZNO FILM; ELECTRO-MECHANICAL COUPLING COEFFICIENT; PIEZOELECTRIC FILMS; QUASI-SHEAR ELECTROMECHANICAL COUPLING COEFFICIENT; RF MAGNETRON SPUTTERING TECHNIQUE; SHEAR MODES; ZNO FILMS;

ELECTROMECHANICAL DEVICES;

EID: 48149101090     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.309     Document Type: Conference Paper

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