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Volumn 46, Issue 45-49, 2007, Pages
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Highly oriented ZnO thin films deposited by grazing ion-beam sputtering: Application to acoustic shear wave excitation in the GHz range
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Author keywords
(112 0) textured ZnO film; Acoustic shear wave excitation; In plane texture formation; Ion beam sputter deposition; Ion beam induced texture evolution
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Indexed keywords
ACOUSTICS;
BEAM PLASMA INTERACTIONS;
ELASTIC WAVES;
ELECTROMAGNETIC WAVES;
ION BEAMS;
ION BOMBARDMENT;
IONIC CONDUCTION;
METALLIC FILMS;
OPTICAL FILMS;
SEMICONDUCTING ZINC COMPOUNDS;
SHEAR WAVES;
TEXTURES;
THICK FILMS;
THIN FILMS;
ZINC ALLOYS;
ZINC OXIDE;
ACOUSTIC SHEAR WAVE EXCITATION;
ACOUSTIC SHEAR WAVES;
CHANNELING EFFECTS;
CONVERSION LOSSES;
DEPOSITION SYSTEMS;
FRACTIONAL BANDWIDTHS;
GRAZING INCIDENCES;
GRAZING IONS;
IN-PLANE TEXTURE FORMATION;
ION BEAM SPUTTER-DEPOSITION;
ION BEAM SPUTTERS;
LONGITUDINAL WAVES;
SCAN PROFILES;
SHADOWING EFFECTS;
SUBMICRON;
SUBSTRATE SURFACES;
X-RAY DIFFRACTIONS;
ZNO FILMS;
ZNO THIN FILMS;
IONS;
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EID: 54249118694
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.46.L1167 Document Type: Article |
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Times cited : (8)
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References (21)
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