Development of template and mask replication using jet and Flash Imprint Lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7823, Issue PART 1, 2010, Pages

  Brooks, Cynthia ^a   Selinidis, Kosta ^a   Doyle, Gary ^a   Brown, Laura ^a   LaBrake, Dwayne ^a   Resnick, Douglas J ^a   Sreenivasan, S V ^a  

^a MOLECULAR IMPRINTS INC   (United States)

Author keywords

J FIL; Jet and flash imprint lithography; Mask; Patterned media; Replication; Semiconductor; Template

Indexed keywords

J-FIL; PATTERNED MEDIAS; REPLICATION; SEMICONDUCTOR; TEMPLATE;

FLASH MEMORY; HARD DISK STORAGE; PHOTOMASKS;

NANOIMPRINT LITHOGRAPHY;

EID: 78649889470     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.864332     Document Type: Conference Paper

References (11)

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