SCOPUS 정보 검색 플랫폼

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7637, Issue , 2010, Pages

High volume jet and flash imprint lithography for discrete track patterned media

(6) Ye, Zhengmao a Ramos, Rick a Brooks, Cynthia B a Hellebrekers, Paul a Carden, Scott a LaBrake, Dwayne a

a MOLECULAR IMPRINTS INC (United States)

Author keywords

adhesion promoter; discrete track recording; Imprint lithography; J FIL; Jet and Flash imprint lithography; template

Indexed keywords

ADHESION LAYER; ADHESION PROMOTER; CURRENT TECHNOLOGY; DISCRETE TRACK RECORDING; FEATURE SIZES; FLASH IMPRINT LITHOGRAPHY; HIGH-RESOLUTION PATTERNING; IMPRINT LITHOGRAPHY; KEY PROCESS; MEDIA FABRICATION; PATTERNED MEDIAS; PATTERNING PROCESS; PERPENDICULAR RECORDING; PROCESS USE; STORAGE DENSITIES; UV CURABLE;

ADHESION; MAGNETIC RECORDING;

NANOIMPRINT LITHOGRAPHY;

EID: 77953298999 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.849226 Document Type: Conference Paper

Times cited : (22)

References (9)

1
- 77953302177
- U.S. Patent No. 822,222 8 July
- V. Poulsen, U.S. Patent No. 822,222 (8 July 1899).
- (1899)
- Poulsen, V.¹

2
- 0012184898
- nd ed. Springer, NY
- nd ed. (Springer, NY, 2007).
- (2007) Hard Disk Drive Servo Systems
- Chen, B.M.¹ Lee, T.H.² Peng, K.³ Venkataramanan, V.⁴

3
- 0036762030
- T. Oikawa, M. Nakamura, H. Uwazumi, T. Shimatsu, H. Muraoka, and Y. Nakamura, IEEE Trans. Magn., vol. 38, pp. 1976-1978 (2002).
- (2002) IEEE Trans. Magn. , vol.38 , pp. 1976-1978
- Oikawa, T.¹ Nakamura, M.² Uwazumi, H.³ Shimatsu, T.⁴ Muraoka, H.⁵ Nakamura, Y.⁶

4
- 0032625408
- M. Colburn, S. Johnson, M. Stewart, S. Damle, T. Bailey, B. Choi, M. Wedlake, T. Michaelson, S. V. Sreenivasan, J. Ekerdt, and C. G. Willson, Proc. SPIE, Emerging Lithographic Technologies III, 379 (1999).
- (1999) Proc. SPIE, Emerging Lithographic Technologies , vol.3 , pp. 379
- Colburn, M.¹ Johnson, S.² Stewart, M.³ Damle, S.⁴ Bailey, T.⁵ Choi, B.⁶ Wedlake, M.⁷ Michaelson, T.⁸ Sreenivasan, S.V.⁹ Ekerdt, J.¹⁰ Willson, C.G.¹¹

5
- 77953304860
- June
- M. Colburn, T. Bailey, B. J. Choi, J. G. Ekerdt, S. V. Sreenivasan, Solid State Technology, 67, June 2001.
- (2001) Solid State Technology , vol.67
- Colburn, M.¹ Bailey, T.² Choi, B.J.³ Ekerdt, J.G.⁴ Sreenivasan, S.V.⁵

6
- 4243591197
- T. C. Bailey, D. J. Resnick, D. Mancini, K. J. Nordquist, W. J. Dauksher, E. Ainley, A. Talin, K. Gehoski, J. H. Baker, B. J. Choi, S. Johnson, M. Colburn, S. V. Sreenivasan, J. G. Ekerdt, and C. G. Willson, Microelectronic Engineering 61-62 (2002) 461-467.
- (2002) Microelectronic Engineering , vol.61-62 , pp. 461-467
- Bailey, T.C.¹ Resnick, D.J.² Mancini, D.³ Nordquist, K.J.⁴ Dauksher, W.J.⁵ Ainley, E.⁶ Talin, A.⁷ Gehoski, K.⁸ Baker, J.H.⁹ Choi, B.J.¹⁰ Johnson, S.¹¹ Colburn, M.¹² Sreenivasan, S.V.¹³ Ekerdt, J.G.¹⁴ Willson, C.G.¹⁵

7
- 62649143642
- R. S. Sasaki, T. Hiraka, J. Mizuochi, A. Fujii, Y. Sakai, T. Sutou, S. Yusa, K. Kuriyama, M. Sakaki, Y. Morikawa, H. Mohri, N. Hayashi, Proc. SPIE Vol. 7122, 71223P (2008).
- (2008) Proc. SPIE , vol.7122
- Sasaki, R.S.¹ Hiraka, T.² Mizuochi, J.³ Fujii, A.⁴ Sakai, Y.⁵ Sutou, T.⁶ Yusa, S.⁷ Kuriyama, K.⁸ Sakaki, M.⁹ Morikawa, Y.¹⁰ Mohri, H.¹¹ Hayashi, N.¹²

8
- 77953297695
- Toward Automated Pattern Inspection and Defect Characterization for Patterned Media Lithography
- presented at The
- rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication" on May 28, 2009.
- rd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication on May 28, 2009
- Schmid, G.M.¹ Khusnatdinov, N.² Luo, K.³ Fretwell, J.⁴ Wada, H.⁵ Resnick, D.⁶

9
- 77953315483
- G. M. Schmid; C. Brooks; Z. Ye; S. Johnson; D. LaBrake; S. V. Sreenivasan; D. J. Resnick, Proc. SPIE Vol. 7488, 748820, 2009.
- (2009) Proc. SPIE , vol.7488 , pp. 748820
- Schmid, G.M.¹ Brooks, C.² Ye, Z.³ Johnson, S.⁴ LaBrake, D.⁵ Sreenivasan, S.V.⁶ Resnick, D.J.⁷

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