Jet and Flash Imprint Lithography for the fabrication of patterned media drives

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7488, Issue , 2009, Pages

  Schmid, Gerard M ^a   Brooks, Cynthia ^a   Ye, Zhengmao ^a   Johnson, Steve ^a   LaBrake, Dwayne ^a   Sreenivasan, S V ^a   Resnick, Douglas J ^a  

^a MOLECULAR IMPRINTS INC   (United States)

Author keywords

Defect inspection; Imprint; J FIL; Jet and Flash Imprint Lithography; Patterned media; Template

Indexed keywords

DEFECT INSPECTION; IMPRINT; J-FIL; PATTERNED MEDIAS; TEMPLATE;

DEFECTS; DRIVES; HARD DISK STORAGE; MAGNETIC STORAGE; PHOTOMASKS; SUBSTRATES; TECHNOLOGY;

NANOIMPRINT LITHOGRAPHY;

EID: 77953315483     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.833366     Document Type: Conference Paper

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