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Volumn , Issue , 2000, Pages 512-514
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Preparation of diamond-like carbon films by plasma source ion implantation with superposed pulse
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPES;
DIAMOND-LIKE CARBON;
DLC FILM;
FRICTION COEFFICIENTS;
INDENTATION METHOD;
NEGATIVE VOLTAGE;
PLANAR COIL;
PLASMA SOURCE ION IMPLANTATION;
PULSE CONDITION;
RAMAN SPECTRA;
SCANNING ELECTRON MICROSCOPE;
STAINLESS STEEL SUBSTRATES;
STRUCTURAL CHARACTERIZATION;
SUBSTRATE HOLDERS;
WORKING GAS;
AMORPHOUS FILMS;
DIAMOND LIKE CARBON FILMS;
ELECTROMAGNETIC INDUCTION;
FILM PREPARATION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
FOURIER TRANSFORMS;
FRICTION;
INDUCTIVELY COUPLED PLASMA;
ION IMPLANTATION;
PLASMA SOURCES;
PULSE GENERATORS;
RAMAN SCATTERING;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SIGNAL GENERATORS;
SILICON WAFERS;
STAINLESS STEEL;
SUBSTRATES;
CARBON FILMS;
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EID: 78649845882
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/.2000.924200 Document Type: Conference Paper |
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Times cited : (2)
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References (14)
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