Recent advances in plasma source ion implantation at Los Alamos National Laboratory

Surface and Coatings Technology

Volumn 84, Issue 1-3, 1996, Pages 528-536

  Munson, Carter P ^a   Faehl, R J ^a   Henins, I ^a   Nastasi, M ^a   Reass, W A ^a   Rej, D J ^a   Scheuer, J T ^a   Walter, K C ^a   Wood, B P ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Diamond like carbon; Implantation; Plasma

Indexed keywords

AMMONIA; CARBON; CHROMIUM; ELECTROPLATING; GASES; HARDNESS; ION BEAMS; PLASMA SHEATHS; PLASMA SOURCES; RESEARCH LABORATORIES; SURFACE TREATMENT; WEAR OF MATERIALS;

CATHODIC ARCS; DIAMOND LIKE CARBON; HYDROGEN CONCENTRATION; ION BEAM ASSISTED DEPOSITION; PLASMA SOURCE ION IMPLANTATION;

ION IMPLANTATION;

EID: 0030271060     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(95)02836-6     Document Type: Article

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