Influence of Pulse Conditions on the Properties of DLC Films Prepared by Plasma Source Ion Implantation

New Diamond and Frontier Carbon Technology

Volumn 9, Issue 6, 1999, Pages 417-423

  Baba, Koumei ^a   Hatada, Ruriko ^a  

^a INDUSTRIAL TECHNOLOGY CENTER OF NAGASAKI   (Japan)

Author keywords

Diamond like carbon film; Plasma source ion implantation

Indexed keywords

EID: 0038527685     PISSN: 13449931     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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