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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 655-658

Preparation of hydrophobic diamond like carbon films by plasma source ion implantation

(2) Hatada, R a Baba, K a

a Technology Center of Nagasaki (Japan)

Author keywords

DLC; Hydrophobic; Plasma source ion implantation

Indexed keywords

ANGLE MEASUREMENT; CHEMICAL BONDS; CONTACT ANGLE; CORROSION RESISTANCE; DEPOSITION; HARDNESS; HYDROPHOBICITY; ION IMPLANTATION; MECHANICAL VARIABLES MEASUREMENT; PLASMA SOURCES; SILICON WAFERS; STAINLESS STEEL;

FLUOROBENZENE; HEXAFLUOROBENZENE; PLASMA SOURCE ION IMPLANTATION (PSII);

DIAMOND FILMS;

EID: 0033513715 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(98)00745-9 Document Type: Article

Times cited : (60)

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