Gas permeation in polydimethylsiloxane in-situ monitoring by silicon pressure sensors

Advanced Materials Research

Volumn 74, Issue , 2009, Pages 113-116

  Yang, Lung Jieh ^a  

^a TAMKANG UNIVERSITY   (Taiwan)

Author keywords

Carbon dioxide; Diffusion coefficient; Gas leakage; PDMS (polydimethylsiloxane)

Indexed keywords

DIFFERENT THICKNESS; DIFFUSION COEFFICIENTS; DIFFUSION MECHANISMS; GAS LEAKAGE; GAS LEAKAGES; GAS PERMEATION; IN-SITU MONITORING; OUTPUT VOLTAGES; PDMS (POLYDIMETHYLSILOXANE); PDMS MEMBRANE; PRESSURIZED CHAMBERS; PYREX 7740 GLASS; SENSOR CAVITY; SILICON PRESSURE SENSORS; TIME HISTORY; V GROOVES;

CARBON DIOXIDE; DIFFUSION; GAS PERMEABLE MEMBRANES; GASES; MICROCHANNELS; PERMEATION; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SILICONES;

LEAKAGE (FLUID);

EID: 73549089531     PISSN: 10226680     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMR.74.113     Document Type: Conference Paper

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