Origin of Compressive Residual Stress in Polycrystalline Thin Films

Physical Review Letters

Volumn 88, Issue 15, 2002, Pages 4-

  Chason, E ^a   Sheldon, B W ^a   Freund, L B ^a   Floro, J A ^b   Hearne, S J ^b  

^a Brown University   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 78649734648     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.88.156103     Document Type: Article

References (18)

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