A facile method to improve tribological properties of silicon surface by combining nanogrooves patterning and thin film lubrication

Colloids and Surfaces A: Physicochemical and Engineering Aspects

Volumn 372, Issue 1-3, 2010, Pages 139-145

  Wang, Ying ^a,b,c   Wang, Liping ^a   Xue, Qunji ^a   Yuan, Ningyi ^b   Ding, Jianning ^b  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b CHANGZHOU UNIVERSITY   (China)

^c UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

MACs; Microfriction; Nanofriction; Texture

Indexed keywords

ANGLE MEASUREMENT; CHEMICAL MODIFICATION; CONTACT ANGLE; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON COMPOUNDS; SURFACE CHEMISTRY; SURFACE STRUCTURE; TEXTURES; THIN FILMS; TRIBOLOGY; VAPOR DEPOSITION; WETTING;

CHEMICAL TREATMENTS; CHEMICALLY MODIFIED; FACILE METHOD; MACS; MEMS/NEMS; MICROFRICTION; NANO-SCALE ROUGHNESS; NANOFRICTION; NANOGROOVES; NANOSCALED; REAL AREA OF CONTACT; SILICON SURFACES; SURFACE COVERAGES; SURFACE ENERGIES; SURFACE HYDROPHILICITY; THIN FILM LUBRICATION; TRIBOLOGICAL BEHAVIORS; TRIBOLOGICAL PROPERTIES;

SURFACE ROUGHNESS;

CYCLOPENTANE DERIVATIVE; NANOPARTICLE; SILICON;

ADHESION; ALKYLATION; ARTICLE; CHEMICAL MODIFICATION; ENERGY; FILM; FRICTION; HYDROPHILICITY; LUBRICATION; NANOANALYSIS; NANOELECTROMECHANICAL SYSTEM; PRIORITY JOURNAL; SURFACE PROPERTY; TECHNIQUE; WETTABILITY;

EID: 78649446430     PISSN: 09277757     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.colsurfa.2010.10.020     Document Type: Article

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