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Volumn 53, Issue 2, 2010, Pages 219-223

Wettability and nanotribological property of multiply alkylated cyclopentanes (MACs) on silicon substrates

Author keywords

Etching; Hydrogenated; Hydroxylated; Nanoadhesion force; Nanofriction force

Indexed keywords

ATOMIC FORCE MICROSCOPES; CHEMICAL COMPOSITIONS; DIPCOATING METHODS; ETCHING PROCESS; FRICTION FORCE; HYDROGENATED; HYDROGENATED SILICON; HYDROXYLATED; NANOADHESION; NANOFRICTION; NANOTRIBOLOGICAL PROPERTIES; SILICON SUBSTRATES; SOLID SURFACE; SURFACE ENERGIES; SURFACE MICROSTRUCTURES; TOPOLOGICAL STRUCTURE;

EID: 77955737350     PISSN: 10402004     EISSN: 1547397X     Source Type: Journal    
DOI: 10.1080/10402000903156845     Document Type: Article
Times cited : (18)

References (39)
  • 1
    • 0033897055 scopus 로고    scopus 로고
    • Materials Issues in Microelectromechanical Systems (MEMS)
    • Spearing, S. M. (2000), "Materials Issues in Microelectromechanical Systems (MEMS)," Acta Mater. 48, pp 179-196.
    • (2000) Acta Mater , vol.48 , pp. 179-196
    • Spearing, S.M.1
  • 2
    • 33745482231 scopus 로고
    • Microtribological Characterization of Self-Assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy
    • Bhushan, B., Kulkarni, A. V., Boehm, M., Koinkar, V. N., Odoni, L., Martelet, C., and Belin M. (1995), "Microtribological Characterization of Self-Assembled and Langmuir-Blodgett Monolayers by Atomic and Friction Force Microscopy," Langmuir 11, pp 3189-3198.
    • (1995) Langmuir , vol.11 , pp. 3189-3198
    • Bhushan, B.1    Kulkarni, A.V.2    Boehm, M.3    Koinkar, V.N.4    Odoni, L.5    Martelet, C.6    Belin, M.7
  • 3
    • 0000364231 scopus 로고
    • Surface Micromachining for Microsensors and Microactuators
    • Howe, R. T. (1988), "Surface Micromachining for Microsensors and Microactuators," J. Vac. Sci. Technol. B 6, pp 1809-1813.
    • (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1809-1813
    • Howe, R.T.1
  • 4
  • 5
    • 0020127035 scopus 로고
    • Silicon as a Mechanical Material
    • Petersen, K. (1982), "Silicon as a Mechanical Material," Proc. IEEE Electron Devices 70, pp 420-457.
    • (1982) Proc. IEEE Electron Devices , vol.70 , pp. 420-457
    • Petersen, K.1
  • 6
    • 85046490398 scopus 로고    scopus 로고
    • Self-Assembled Monolayers for Controlling Hydrophobicity and/or Friction and Wear
    • B. Bhushan (Ed.), CRC Press: Boca Raton, FL
    • Bhushan, B. (2001), "Self-Assembled Monolayers for Controlling Hydrophobicity and/or Friction and Wear," B. Bhushan (Ed.), Modern Tribology Handbook: Vol. 2. Materials Coatings and Industrial Applications, pp 909-929, CRC Press: Boca Raton, FL.
    • (2001) Modern Tribology Handbook: Vol. 2. Materials Coatings and Industrial Applications , pp. 909-929
    • Bhushan, B.1
  • 7
    • 0034909993 scopus 로고    scopus 로고
    • Nanotribological Properties and Mechanisms of Alkylthiol and Biphenyl Thiol Self-Assembled Monolayers Studied by AFM
    • Bhushan, B., and Liu, H. (2001), "Nanotribological Properties and Mechanisms of Alkylthiol and Biphenyl Thiol Self-Assembled Monolayers Studied by AFM," Phys. Rev. B. 63, pp 245412-245423.
    • (2001) Phys. Rev. B , vol.63 , pp. 245412-245423
    • Bhushan, B.1    Liu, H.2
  • 8
    • 0036326337 scopus 로고    scopus 로고
    • Investigation of Nanotribological Properties of Self-Assembled Monolayers With Alkyl and Biphenyl Space Chains
    • Liu, H., and Bhushan, B. (2002), "Investigation of Nanotribological Properties of Self-Assembled Monolayers With Alkyl and Biphenyl Space Chains," Ultramicroscopy 91, pp 185-202.
    • (2002) Ultramicroscopy , vol.91 , pp. 185-202
    • Liu, H.1    Bhushan, B.2
  • 9
    • 0027667940 scopus 로고
    • Structure and Tribological Properties of Ultrathin Alkylsilane Films Chemisorbed to Solid Surfaces
    • Ruehe, J., Novotny, V. J., Kanazawa, K. K., Clarke, T., and Street, G. B. (1993), "Structure and Tribological Properties of Ultrathin Alkylsilane Films Chemisorbed to Solid Surfaces," Langmuir 9, pp 2383-2388.
    • (1993) Langmuir , vol.9 , pp. 2383-2388
    • Ruehe, J.1    Novotny, V.J.2    Kanazawa, K.K.3    Clarke, T.4    Street, G.B.5
  • 10
    • 0037658047 scopus 로고    scopus 로고
    • Effect of Surface Chemistry on the Tribological Performance of a MEMS Electrostatic Lateral Output Motor
    • Patton, S. T., William, D. C., Eapen, K. C., and Zabinski, J. S. (2000), "Effect of Surface Chemistry on the Tribological Performance of a MEMS Electrostatic Lateral Output Motor," Tribol. Lett. 9, pp 199-209.
    • (2000) Tribol. Lett , vol.9 , pp. 199-209
    • Patton, S.T.1    William, D.C.2    Eapen, K.C.3    Zabinski, J.S.4
  • 11
    • 0001058741 scopus 로고    scopus 로고
    • Mechanistic Aspects of Alkylchlorosilane Coupling Reactions
    • Rye, R.R., Nelson, G. C., and Dugger, M. T. (1997), "Mechanistic Aspects of Alkylchlorosilane Coupling Reactions," Langmuir 13, pp 2965-2972.
    • (1997) Langmuir , vol.13 , pp. 2965-2972
    • Rye, R.R.1    Nelson, G.C.2    Dugger, M.T.3
  • 12
    • 84976355631 scopus 로고    scopus 로고
    • Micro-Electro-Mechanical Systems/Vacuum Technology
    • Sundararajan, S., and Bhushan, B. (2001), "Micro-Electro-Mechanical Systems/Vacuum Technology," J. Vac. Sci. Technol. A 19, pp 1777-1785.
    • (2001) J. Vac. Sci. Technol. A , vol.19 , pp. 1777-1785
    • Sundararajan, S.1    Bhushan, B.2
  • 13
    • 0034214772 scopus 로고    scopus 로고
    • Research on Liquid Lubricants for Space Mechanisms
    • Jones, W. R., Jr., Shogrin, B. A., and Jansen, M. J. (2000), "Research on Liquid Lubricants for Space Mechanisms," Synth. Lubri. 2, pp 109-122.
    • (2000) Synth. Lubri , vol.2 , pp. 109-122
    • Jones Jr., W.R.1    Shogrin, B.A.2    Jansen, M.J.3
  • 14
    • 0003135356 scopus 로고
    • Stability of Perfluoropolyethers
    • Paciorek, K. J. L., and Kratzer, R. H. (1994), "Stability of Perfluoropolyethers," J. Fluor. Chem. 67, pp 169-175.
    • (1994) J. Fluor. Chem , vol.67 , pp. 169-175
    • Paciorek, K.J.L.1    Kratzer, R.H.2
  • 15
    • 0000519647 scopus 로고
    • Degradation of Perfluorpolymers Catalyzed by Lewis Acids
    • Kasai, P. H. (1992), "Degradation of Perfluorpolymers Catalyzed by Lewis Acids," ASME Adv. Inf. Stor. Syst. 4, pp 291-314.
    • (1992) ASME Adv. Inf. Stor. Syst , vol.4 , pp. 291-314
    • Kasai, P.H.1
  • 16
    • 0000703478 scopus 로고    scopus 로고
    • The Decomposition Reaction Path of a Linear PFPAE under Tribological Condition
    • Helmick, L. S., Liang, J. C., and Ream, B. E. (1998), "The Decomposition Reaction Path of a Linear PFPAE under Tribological Condition," Tribol. Lett. 4, pp 287-292.
    • (1998) Tribol. Lett , vol.4 , pp. 287-292
    • Helmick, L.S.1    Liang, J.C.2    Ream, B.E.3
  • 17
    • 0024698793 scopus 로고
    • Tribological Reaction of Perfluoropolyether Oils with Stainless under Ultrahigh Vacuum Conditions at Temperature
    • Mori, S., and Morales, W. (1989), "Tribological Reaction of Perfluoropolyether Oils with Stainless under Ultrahigh Vacuum Conditions at Temperature," Wear 132, pp 111-121.
    • (1989) Wear , vol.132 , pp. 111-121
    • Mori, S.1    Morales, W.2
  • 18
    • 84983436472 scopus 로고
    • Lubricants Comprising Novel Cyclopentanes Cyclopentadienes, Cyclopentenes and Mixtures Thereof and Methods of Manufacture
    • Venier, C. G., and Casserly, E. W. (1990), "Lubricants Comprising Novel Cyclopentanes Cyclopentadienes, Cyclopentenes and Mixtures Thereof and Methods of Manufacture," U.S. Patent 4,929,782.
    • (1990) U.S. Patent , vol.4
    • Venier, C.G.1    Casserly, E.W.2
  • 19
    • 34247375227 scopus 로고    scopus 로고
    • Effect of Multiply-Alkylated Cyclopentane (MAC) on Durability and Load-Carrying Capacity of Self-Assembled Monolayers on Silicon Wafer
    • Ma, J. Q., Liu, J. X., Mo, Y. F., and Bai, M. W. (2007), "Effect of Multiply- Alkylated Cyclopentane (MAC) on Durability and Load-Carrying Capacity of Self-Assembled Monolayers on Silicon Wafer," Colloids Surf. A 301, pp 481-489.
    • (2007) Colloids Surf. A , vol.301 , pp. 481-489
    • Ma, J.Q.1    Liu, J.X.2    Mo, Y.F.3    Bai, M.W.4
  • 20
    • 34548015892 scopus 로고    scopus 로고
    • Preparation and Tribological Properties of Multiply-Alkylated Cyclopentane (MAC)- Octadecyltrichlorosilane (OTS) Double-Layer Film on Silicon
    • Ma, J. Q., Pang, C. J., Mo, Y. F., and Bai, M. W. (2007), "Preparation and Tribological Properties of Multiply-Alkylated Cyclopentane (MAC)- Octadecyltrichlorosilane (OTS) Double-Layer Film on Silicon," Wear 263, pp 1000-1007.
    • (2007) Wear , vol.263 , pp. 1000-1007
    • Ma, J.Q.1    Pang, C.J.2    Mo, Y.F.3    Bai, M.W.4
  • 21
    • 0026191643 scopus 로고
    • Multiply-Alkylated Cyclopentanes (MACs): A New Class of Synthesized Hydrocarbon Fluids
    • Venier, C. G., and Casserly, E. W. (1991), "Multiply-Alkylated Cyclopentanes (MACs): A New Class of Synthesized Hydrocarbon Fluids," Lubr. Eng. 47, pp 586-591.
    • (1991) Lubr. Eng , vol.47 , pp. 586-591
    • Venier, C.G.1    Casserly, E.W.2
  • 22
    • 0041630637 scopus 로고    scopus 로고
    • A New Class of Synthetic Hydrocarbon Fluid Lubricant for Space Applications
    • Dube, M. J., Bollea, D., Jones, W. R., Marrcheti, M., and Jansen, M. J. (2003), "A New Class of Synthetic Hydrocarbon Fluid Lubricant for Space Applications," Tribol. Lett. 15, pp 3-8.
    • (2003) Tribol. Lett , vol.15 , pp. 3-8
    • Dube, M.J.1    Bollea, D.2    Jones, W.R.3    Marrcheti, M.4    Jansen, M.J.5
  • 28
    • 33748276762 scopus 로고
    • Scanning Tunneling Microscopy and Atomic Force Microscopy in Organic Chemistry
    • Frommer, J. (1992), "Scanning Tunneling Microscopy and Atomic Force Microscopy in Organic Chemistry," Angew. Chem., Int. Ed. Engl. 31, pp 1298-1328.
    • (1992) Angew. Chem., Int. Ed. Engl , vol.31 , pp. 1298-1328
    • Frommer, J.1
  • 29
    • 0028277071 scopus 로고
    • The AFM as a Tool for Surface Imaging
    • Quate, C. F. (1994), "The AFM as a Tool for Surface Imaging," Surf. Sci. 300, pp 980-995.
    • (1994) Surf. Sci , vol.300 , pp. 980-995
    • Quate, C.F.1
  • 30
    • 0034299950 scopus 로고    scopus 로고
    • Investigation of Humidity-Dependent Capillary Force
    • Xiao, X. D., and Qian, L. M. (2000), "Investigation of Humidity-Dependent Capillary Force," Langmuir 16, pp 8153-8158.
    • (2000) Langmuir , vol.16 , pp. 8153-8158
    • Xiao, X.D.1    Qian, L.M.2
  • 31
    • 0031675566 scopus 로고    scopus 로고
    • Adhesive and Friction Forces Between Chemically Modified Silicon and Silicon Nitride Surfaces
    • Tsukruk, V. V., and Bliznyuk, V. N. (1998), "Adhesive and Friction Forces Between Chemically Modified Silicon and Silicon Nitride Surfaces," Langmuir 14, pp 446-455.
    • (1998) Langmuir , vol.14 , pp. 446-455
    • Tsukruk, V.V.1    Bliznyuk, V.N.2
  • 32
    • 85021792427 scopus 로고
    • Resistance of Solid Surfaces toWetting by Water
    • Wenzel, R. N. (1936), "Resistance of Solid Surfaces toWetting by Water," Ind. Eng. Chem. 28, pp 988-994.
    • (1936) Ind. Eng. Chem , vol.28 , pp. 988-994
    • Wenzel, R.N.1
  • 33
    • 35648975505 scopus 로고
    • Wettability of Porous Surfaces
    • Cassie, A. B. D., and Baxter, S. (1944), "Wettability of Porous Surfaces," Trans. Faraday Soc. 40, pp 546-551.
    • (1944) Trans. Faraday Soc , vol.40 , pp. 546-551
    • Cassie, A.B.D.1    Baxter, S.2
  • 34
    • 0008854828 scopus 로고
    • Influence of Capillary Condensation of Water on Nanotribology Studied by Force Microscopy
    • Binggeli, M., and Mate, C. M. (1994), "Influence of Capillary Condensation of Water on Nanotribology Studied by Force Microscopy," Appl. Phys. Lett. 65, pp 15-417.
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 15-417
    • Binggeli, M.1    Mate, C.M.2
  • 35
    • 0000289703 scopus 로고    scopus 로고
    • Adhesion Forces Between Surface-Modified AFM Tips and a Mica Surface
    • Eastman, T., and Zhu, D. M. (1996), "Adhesion Forces Between Surface-Modified AFM Tips and a Mica Surface," Langmuir 12, pp 2859-2862.
    • (1996) Langmuir , vol.12 , pp. 2859-2862
    • Eastman, T.1    Zhu, D.M.2
  • 36
    • 0034658375 scopus 로고    scopus 로고
    • Adhesion Forces Measured by Atomic Force Microscopy in Humid Air
    • Sedin, D. L., and Rowlen, K. L. (2000), "Adhesion Forces Measured by Atomic Force Microscopy in Humid Air," Anal. Chem. 72, pp 2183-2189.
    • (2000) Anal. Chem , vol.72 , pp. 2183-2189
    • Sedin, D.L.1    Rowlen, K.L.2
  • 37
    • 0035917268 scopus 로고    scopus 로고
    • Friction Force Microscopy of Self-Assembled Monolayers: Influence of Adsorbate Alkyl Chain Length, Terminal Group Chemistry, and Scan Velocity
    • Brewer, N. J., Beake, B. D., and Leggett, G. J. (2001), "Friction Force Microscopy of Self-Assembled Monolayers: Influence of Adsorbate Alkyl Chain Length, Terminal Group Chemistry, and Scan Velocity," Langmuir 17, pp 1970-1974.
    • (2001) Langmuir , vol.17 , pp. 1970-1974
    • Brewer, N.J.1    Beake, B.D.2    Leggett, G.J.3
  • 38
    • 20844433364 scopus 로고    scopus 로고
    • Stzep-Growth Synthesis and Interfacial Friction Properties of Surface Dendron Coatings
    • Zhang, Q., and Archer, L. A. (2005), "Stzep-Growth Synthesis and Interfacial Friction Properties of Surface Dendron Coatings," Langmuir 21, pp 5405-5413.
    • (2005) Langmuir , vol.21 , pp. 5405-5413
    • Zhang, Q.1    Archer, L.A.2
  • 39
    • 20744441694 scopus 로고    scopus 로고
    • Combined Effect of Chain Length and Phase State on Adhesion/Friction Behavior of Self-Assembled Monolayers
    • Lee, D. H., Oh, T., and Cho, K. (2005), "Combined Effect of Chain Length and Phase State on Adhesion/Friction Behavior of Self-Assembled Monolayers," J. Phys. Chem. B 109, pp 11301-11306.
    • (2005) J. Phys. Chem. B , vol.109 , pp. 11301-11306
    • Lee, D.H.1    Oh, T.2    Cho, K.3


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