Temperature characteristics of pure shear mode FBARs consisting of (112̄0) textured ZnO films

Proceedings - IEEE Ultrasonics Symposium

Volumn 1, Issue , 2006, Pages 1459-1462

  Yanagitani, Takahiko ^a   Kiuchi, Masato ^a   Matsukawa, Mami ^b   Watanabe, Yoshiaki ^b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

(11 20) textured ZnO film; Component; Pure shear mode FBAR; Temperature coefficient of frequency

Indexed keywords

COMPONENT; MODE RESONATORS; PARALLEL RESONANT; PURE SHEAR; SHEAR MODE RESONATORS; TEMPERATURE CHARACTERISTIC; TEMPERATURE COEFFICIENT; TEMPERATURE COEFFICIENT OF FREQUENCY; TEMPERATURE RANGE; THICKNESS SHEAR MODES; ZNO FILMS;

ION SENSITIVE FIELD EFFECT TRANSISTORS; METALLIC FILMS; NATURAL FREQUENCIES; RESONATORS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 78649348233     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2006.367     Document Type: Conference Paper

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