Temperature of Particulates in Low-Pressure rf-Plasmas in Ar, Ar/H2 and Ar/N2 Mixtures

Contributions to Plasma Physics

Volumn 50, Issue 10, 2010, Pages 954-961

  Maurer, H R ^a   Basner, R ^b   Kersten, H ^a  

^a UNIVERSITY OF KIEL   (Germany)

^b INP eV   (Germany)

Author keywords

Dusty plasmas; Particle temperature; Plasma diagnostics; Plasma surface interaction

Indexed keywords

ADAPTIVE OPTICS; ELECTRIC DISCHARGES; NITROGEN PLASMA; PLASMA INTERACTIONS;

CAPACITIVELY COUPLED; DUSTY PLASMAS; LOW PRESSURES; MICRO PARTICLES; PARTICLE TEMPERATURE; PARTICULATES; PLASMA'S DIAGNOSTICS; PLASMA/SURFACE INTERACTIONS; RF DISCHARGE; RF PLASMA;

PLASMA DIAGNOSTICS;

EID: 78449282928     PISSN: 08631042     EISSN: 15213986     Source Type: Journal    
DOI: 10.1002/ctpp.201000022     Document Type: Article

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