About the EDF formation in a capacitively coupled argon plasma

Plasma Sources Science and Technology

Volumn 15, Issue 3, 2006, Pages 507-516

  Tatanova, M ^a,b   Thieme, G ^b   Basner, R ^b   Hannemann, M ^b   Golubovskii, Yu B ^a   Kersten, H ^b,c  

^a ST PETERSBURG STATE UNIVERSITY   (Russian Federation)

^b Institut für Niedertemperatur Plasmaphysik   (Germany)

^c UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; HEATING; IONIZATION; MAXWELL EQUATIONS; RADIO WAVES;

BOLTZMANN KINETIC EQUATION; ELECTRON DISTRIBUTION FUNCTION (EDF); ELECTRON-ATOM COLLISIONS; ELECTRON-ELECTRON INTERACTIONS; LANGMUIR PROBE;

INDUCTIVELY COUPLED PLASMA;

EID: 33745612241     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/15/3/029     Document Type: Article

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