Structural and optical properties of yttrium oxide thin films for planar waveguiding applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 6, 2010, Pages 1388-1392

  Pearce, Stuart J ^a   Parker, Greg J ^a   Charlton, Martin D B ^a   Wilkinson, James S ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS LAYER; AMORPHOUS STRUCTURES; CRYSTALLINE NATURE; CRYSTALLINE PHASE; DEPOSITION METHODS; INFRARED REGIONS; OXIDE THIN FILMS; OXYGEN CONTENT; OXYGEN PRESSURE; POLYCRYSTALLINE STRUCTURE; PROCESS PARAMETERS; RARE EARTH DOPED; REACTIVE EVAPORATION; STRUCTURAL AND OPTICAL PROPERTIES; THIN FILM LAYERS; UPCONVERSION LASERS; WAVE-GUIDING;

CRYSTALLINE MATERIALS; OXIDE FILMS; OXYGEN; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; STOICHIOMETRY; THIN FILMS; VAPOR DEPOSITION; WAVEGUIDES; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; YTTRIUM; YTTRIUM ALLOYS; YTTRIUM OXIDE;

AMORPHOUS FILMS;

EID: 78149430200     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3503621     Document Type: Article

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