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Volumn 253, Issue 19, 2007, Pages 8165-8168
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Rare-earth implanted Y 2 O 3 thin films
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Author keywords
PLD; Rare earth implanted thin films; Y 2 O 3
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Indexed keywords
ANNEALING;
FILM GROWTH;
ION IMPLANTATION;
PHOTOLUMINESCENCE;
PULSED LASER DEPOSITION;
RARE EARTH ADDITIONS;
YTTRIUM OXIDE;
EMISSION SPECTRUM;
OXYGEN ATMOSPHERE;
RARE-EARTH IMPLANTED THIN FILMS;
THIN FILMS;
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EID: 34447336410
PISSN: 01694332
EISSN: None
Source Type: Journal
DOI: 10.1016/j.apsusc.2007.02.121 Document Type: Article |
Times cited : (19)
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References (15)
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