Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH

Applied Surface Science

Volumn 255, Issue 24, 2009, Pages 9758-9760

  Matsuo, Shigeki ^a   Sumi, Haruki ^a   Kiyama, Satoshi ^a   Tomita, Takuro ^a   Hashimoto, Shuichi ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Femtosecond laser assisted etching; Potassium hydroxide (KOH); Pyrex glass; Selective etching

Indexed keywords

ETCHING; FEMTOSECOND LASERS; POTASSIUM HYDROXIDE; SOLUTIONS;

FEMTOSECOND LASER-ASSISTED ETCHINGS; PYREX GLASS; SELECTIVE ETCHING; SPATIAL RESOLUTION; THREE DIMENSIONAL MICROCHANNELS;

BOROSILICATE GLASS;

EID: 70349440775     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.04.065     Document Type: Article

References (8)

1. Kondo Y., Qiu J., Mitsuyu T., Hirao K., and Yoko T. Jpn. J. Appl. Phys. 38 (1999) L1146
2. Cheng Y., Sugioka K., and Midorikawa K. Opt. Lett. 29 (2004) 2007
3. Sugioka K., Cheng Y., and Midorikawa K. Appl. Phys. A 81 (2005) 1
4. Marcinkevičius A., Juodkazis S., Watanabe M., Miwa M., Matsuo S., Misawa H., and Nishii J. Opt. Lett. 26 (2001) 277
5. Matsuo S., Kiyama S., Shichijo Y., Tomita T., Hashimoto S., Hosokawa Y., and Masuhara H. Appl. Phys. Lett. 93 (2008) 051107
6. Chang C., Abe T., and Esashi M. Sens. Mater. 15 (2003) 137
7. Juodkazis S., Nishimura K., Misawa H., Ebisui T., Waki R., Matsuo S., and Okada T. Adv. Mater. 18 (2006) 1361
8. Matsuo S., Tabuchi Y., Okada T., Juodkazis S., and Misawa H. Appl. Phys. A 84 (2006) 99