Schottky photodetector integration on LOCOS-defined SOI waveguides

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7750, Issue , 2010, Pages

  Li, Shuxia ^a   Tarr, N Garry ^a   Berini, Pierre ^b  

^a CARLETON UNIVERSITY   (Canada)

^b UNIVERSITY OF OTTAWA   (Canada)

Author keywords

Integrated photodetector; LOCOS; Ni; Pt; Schottky diode; SOI waveguide

Indexed keywords

INTEGRATED PHOTODETECTOR; LOCOS; NI; PT; SCHOTTKY DIODES; SOI WAVEGUIDES;

DIODES; OPTOELECTRONIC DEVICES; PHOTODETECTORS; PLATINUM; SILICON OXIDES; WAVEGUIDES;

SCHOTTKY BARRIER DIODES;

EID: 78049464034     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.873027     Document Type: Conference Paper

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