A CMOS-compatible rib waveguide with Local Oxidation of Silicon isolation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6477, Issue , 2007, Pages

  Rowe, Lynda K ^a   Elsey, Michael ^b   Post, Edith ^c   Tarr, N Garry ^a   Knights, Andrew P ^b  

^a CARLETON UNIVERSITY   (Canada)

^b MCMASTER UNIVERSITY   (Canada)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

CMOS; LOCOS; Loss; Rib waveguide; SOI

Indexed keywords

BIREFRINGENCE; CMOS INTEGRATED CIRCUITS; LIGHT EXTINCTION; MACH-ZEHNDER INTERFEROMETERS; OPTICAL BEAM SPLITTERS; SILICON ON INSULATOR TECHNOLOGY;

LOCAL OXIDATION OF SILICON (LOCOS) TECHNIQUE; OPTICAL MODE SIMULATION; OPTICAL RIB WAVEGUIDES; OPTICAL TELECOMMUNICATIONS BANDS;

OPTICAL WAVEGUIDES;

EID: 34248643151     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.714641     Document Type: Conference Paper

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