SCOPUS 정보 검색 플랫폼

Volumn 135, Issue 11, 2010, Pages 2901-2906

Chemiluminescence system for direct determination and mapping of ultra-trace metal impurities on a silicon wafer

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77958061461 PISSN: 00032654 EISSN: 13645528 Source Type: Journal
DOI: 10.1039/c0an00451k Document Type: Article

Times cited : (8)

References (29)

1
- 77958059639
- T. Hattori (ed.), Springer-Verlag, Heidelberg, Germany
- T. Hattori, (ed.), Ultra Clean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing, Springer-Verlag, Heidelberg, Germany, 1998, p29-55
- (1998) Ultra Clean Surface Processing of Silicon Wafers - Secrets of VLSI Manufacturing , pp. 29-55

2
- 24344459373
- T. M. Pan F. H. Ko T. S. Chao C. C. Chen K. S. Chang-Liao Electrochem. Solid-State Lett. 2005 8 8 G201 G203
- (2005) Electrochem. Solid-State Lett. , vol.8 , Issue.8
- Pan, T.M.¹ Ko, F.H.² Chao, T.S.³ Chen, C.C.⁴ Chang-Liao, K.S.⁵

3
- 75849153436
- A. Shimazaki H. Sakurai M. Iwase M. Yoshimura T. Tada Solid State Phenom. 2009 145-146 115 121
- (2009) Solid State Phenom. , vol.145-146 , pp. 115-121
- Shimazaki, A.¹ Sakurai, H.² Iwase, M.³ Yoshimura, M.⁴ Tada, T.⁵

4
- 77958032730
- H. Choi S. Ma J. S. Lee H. B. Lim J. Anal. At. Spectrom. 2010 25 705 715
- (2010) J. Anal. At. Spectrom. , vol.25 , pp. 705-715
- Choi, H.¹ Ma, S.² Lee, J.S.³ Lim, H.B.⁴

5
- 33645687248
- Analytical Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring and Controlling Contamination"
- J. Wang, M. K. Balazs, P. Pianetta, K. Baur, S. Brennan, " Analytical Techniques for Trace Elemental Analyses on Wafer Surfaces for Monitoring and Controlling Contamination " - 19th Annual Semiconductor Pure Water and Chemicals Conference, Mar. 2000
- (2000) 19th Annual Semiconductor Pure Water and Chemicals Conference
- Wang, J.¹ Balazs, M.K.² Pianetta, P.³ Baur, K.⁴ Brennan, S.⁵

6
- 77955232245
- M. Beebe S. Anderson Microelectron. Eng. 2010 87 1701 1705
- (2010) Microelectron. Eng. , vol.87 , pp. 1701-1705
- Beebe, M.¹ Anderson, S.²

7
- 0034269456
- A. Krushevska S. Tan M. Passer X. R. Liu J. Anal. At. Spectrom. 2000 15 1211 1216
- (2000) J. Anal. At. Spectrom. , vol.15 , pp. 1211-1216
- Krushevska, A.¹ Tan, S.² Passer, M.³ Liu, X.R.⁴

8
- 0036025868
- E. J. Ferrero D. Posey J. Anal. At. Spectrom. 2002 17 1194 1201
- (2002) J. Anal. At. Spectrom. , vol.17 , pp. 1194-1201
- Ferrero, E.J.¹ Posey, D.²

9
- 0042012717
- A. Danel T. Lardin C. Giroud F. Tardif Mater. Sci. Eng., B 2003 102 213 217
- (2003) Mater. Sci. Eng., B , vol.102 , pp. 213-217
- Danel, A.¹ Lardin, T.² Giroud, C.³ Tardif, F.⁴

10
- 0000253601
- M. Yamagami M. Nonoguchi T. Yamada T. shoji T. Utaka S. Nomura K. Taniguchi H. Wakita S. Ikeda X-Ray Spectrom. 1999 28 451 455
- (1999) X-Ray Spectrom. , vol.28 , pp. 451-455
- Yamagami, M.¹ Nonoguchi, M.² Yamada, T.³ Shoji, T.⁴ Utaka, T.⁵ Nomura, S.⁶ Taniguchi, K.⁷ Wakita, H.⁸ Ikeda, S.⁹

11
- 0346643727
- M. Yamagami A. Ikeshita Y. Onizuka S. Kojima T. Yamada Spectrochim. Acta, Part B 2003 58 2079 2084
- (2003) Spectrochim. Acta, Part B , vol.58 , pp. 2079-2084
- Yamagami, M.¹ Ikeshita, A.² Onizuka, Y.³ Kojima, S.⁴ Yamada, T.⁵

12
- 59349084688
- A. Danel N. Cabuil T. Lardin D. Despois M. Veillerot C. Geoffroy M. Yamagami H. Kohno Spectrochim. Acta, Part B 2008 63 1375 1381
- (2008) Spectrochim. Acta, Part B , vol.63 , pp. 1375-1381
- Danel, A.¹ Cabuil, N.² Lardin, T.³ Despois, D.⁴ Veillerot, M.⁵ Geoffroy, C.⁶ Yamagami, M.⁷ Kohno, H.⁸

13
- 0003546930
- Marcel Dekker, Inc., New York
- W. R. G. Baeyens, D. D. Keukeleire and K. Korkidis, Luminescence Techniques in Chemical and Biochemical Analysis, Marcel Dekker, Inc., New York, 1991, p533-536
- (1991) Luminescence Techniques in Chemical and Biochemical Analysis , pp. 533-536
- Baeyens, W.R.G.¹ Keukeleire, D.D.² Korkidis, K.³

14
- 0016543438
- T. G. Burdo W. R. Seitz Anal. Chem. 1975 47 1639 1643
- (1975) Anal. Chem. , vol.47 , pp. 1639-1643
- Burdo, T.G.¹ Seitz, W.R.²

15
- 0018439640
- V. Nau T. A. Nieman Anal. Chem. 1979 51 424 428
- (1979) Anal. Chem. , vol.51 , pp. 424-428
- Nau, V.¹ Nieman, T.A.²

16
- 0031920634
- Z. H. Xie F. Zhang Y. S. Pan Analyst 1998 123 273 275
- (1998) Analyst , vol.123 , pp. 273-275
- Xie, Z.H.¹ Zhang, F.² Pan, Y.S.³

17
- 0033972755
- V. Cannizzaro A. R. Bowie A. Sax E. P. Achterberg P. J. Worsfold Analyst 2000 125 51 57
- (2000) Analyst , vol.125 , pp. 51-57
- Cannizzaro, V.¹ Bowie, A.R.² Sax, A.³ Achterberg, E.P.⁴ Worsfold, P.J.⁵

18
- 0034606522
- S. Zhang Y. Wu H. Li Talanta 2000 53 609 616
- (2000) Talanta , vol.53 , pp. 609-616
- Zhang, S.¹ Wu, Y.² Li, H.³

19
- 33947324708
- D. Badocco P. Pastore G. Favaro C. Macca Talanta 2007 72 249 255
- (2007) Talanta , vol.72 , pp. 249-255
- Badocco, D.¹ Pastore, P.² Favaro, G.³ MacCa, C.⁴

20
- 0030181039
- B. Huang J. J. Li L. Zhang J. K. Cheng Anal. Chem. 1996 68 2366 2369
- (1996) Anal. Chem. , vol.68 , pp. 2366-2369
- Huang, B.¹ Li, J.J.² Zhang, L.³ Cheng, J.K.⁴

21
- 0023290924
- Y. Yu F. Yaw X. Wang J. Lumin. 1988 40&41 842 843
- (1988) J. Lumin. , vol.4041 , pp. 842-843
- Yu, Y.¹ Yaw, F.² Wang, X.³

22
- 0033676220
- K. Tsukagoshi M. Hashimoto R. Nakajima A. Arai Anal. Sci. 2000 16 1111 1112
- (2000) Anal. Sci. , vol.16 , pp. 1111-1112
- Tsukagoshi, K.¹ Hashimoto, M.² Nakajima, R.³ Arai, A.⁴

23
- 0026198126
- L. Xiaohu L. Minggang Z. Guiwen Analyst 1991 116 747 748
- (1991) Analyst , vol.116 , pp. 747-748
- Xiaohu, L.¹ Minggang, L.² Guiwen, Z.³

24
- 33947105611
- W. Som-Aum J. Threeprom H. Li J. M. Lin Talanta 2007 71 2062 2068
- (2007) Talanta , vol.71 , pp. 2062-2068
- Som-Aum, W.¹ Threeprom, J.² Li, H.³ Lin, J.M.⁴

25
- 0342424719
- C. Xiaoa D. W. King D. A. Palmer D. J. Wesolowski Anal. Chim. Acta 2000 415 209 219
- (2000) Anal. Chim. Acta , vol.415 , pp. 209-219
- Xiaoa, C.¹ King, D.W.² Palmer, D.A.³ Wesolowski, D.J.⁴

26
- 0035894168
- A. L. Rose T. D. Waite Anal. Chem. 2001 73 5909 5920
- (2001) Anal. Chem. , vol.73 , pp. 5909-5920
- Rose, A.L.¹ Waite, T.D.²

27
- 0026826799
- B. Gammelgaard O. Jøns B. Nielsen Analyst 1992 117 637 640
- (1992) Analyst , vol.117 , pp. 637-640
- Gammelgaard, B.¹ Jøns, O.² Nielsen, B.³

28
- 33646079607
- H. Hong H. B. Lim Anal. Sci. 2006 22 613 616
- (2006) Anal. Sci. , vol.22 , pp. 613-616
- Hong, H.¹ Lim, H.B.²

29
- 0026945022
- T. Ohmi T. Imaoka I. Sugiyama T. Kezuka J. Electrochem. Soc. 1992 139 3317 3335
- (1992) J. Electrochem. Soc. , vol.139 , pp. 3317-3335
- Ohmi, T.¹ Imaoka, T.² Sugiyama, I.³ Kezuka, T.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.