SCOPUS 정보 검색 플랫폼

Volumn 8, Issue 8, 2005, Pages

Effects of metallic contaminants on the electrical characteristics of ultrathin gate oxides

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM; ELECTRIC FIELD EFFECTS; IMPURITIES; INTERMETALLICS; IRON; LEAKAGE CURRENTS; OXIDES; ULTRATHIN FILMS;

INTERFACE STATE DENSITIES; METALLIC CONTAMINANTS; ULTRATHIN GATE OXIDES;

GATES (TRANSISTOR);

EID: 24344459373 PISSN: 10990062 EISSN: None Source Type: Journal
DOI: 10.1149/1.1945367 Document Type: Article

Times cited : (17)

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