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Volumn 22, Issue 4, 2006, Pages 613-616
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Dropping mode chemiluminescence system with a poly(dimethylsiloxane) cell for applications to semiconductor processes
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Author keywords
[No Author keywords available]
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Indexed keywords
CELLS;
CYTOLOGY;
DEIONIZED WATER;
HYDROGEN PEROXIDE;
METAL CLEANING;
METAL IONS;
METALS;
MICROCHANNELS;
REAGENTS;
SEMICONDUCTOR DEVICE MANUFACTURE;
TRACE ELEMENTS;
ANALYTICAL RESULTS;
LIMITS OF DETECTION;
METAL CONTAMINATION;
POLYDIMETHYLSILOXANE PDMS;
RELATIVE STANDARD DEVIATIONS;
SEMICONDUCTOR INDUSTRY;
SEMICONDUCTOR MANUFACTURING PROCESS;
SEMICONDUCTOR PROCESS;
CHEMILUMINESCENCE;
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EID: 33646079607
PISSN: 09106340
EISSN: 13482246
Source Type: Journal
DOI: 10.2116/analsci.22.613 Document Type: Article |
Times cited : (3)
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References (17)
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