Dropping mode chemiluminescence system with a poly(dimethylsiloxane) cell for applications to semiconductor processes

Analytical Sciences

Volumn 22, Issue 4, 2006, Pages 613-616

  Hong, Hyuckgi ^a   Lim, H B ^a  

^a Dankook University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CELLS; CYTOLOGY; DEIONIZED WATER; HYDROGEN PEROXIDE; METAL CLEANING; METAL IONS; METALS; MICROCHANNELS; REAGENTS; SEMICONDUCTOR DEVICE MANUFACTURE; TRACE ELEMENTS;

ANALYTICAL RESULTS; LIMITS OF DETECTION; METAL CONTAMINATION; POLYDIMETHYLSILOXANE PDMS; RELATIVE STANDARD DEVIATIONS; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING PROCESS; SEMICONDUCTOR PROCESS;

CHEMILUMINESCENCE;

EID: 33646079607     PISSN: 09106340     EISSN: 13482246     Source Type: Journal    
DOI: 10.2116/analsci.22.613     Document Type: Article

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