Electrodeposition of copper in a citrate bath and its application to a micro-electro-mechanical system

Wuli Huaxue Xuebao/ Acta Physico - Chimica Sinica

Volumn 26, Issue 10, 2010, Pages 2625-2632

  Wu, Wei Gang ^a   Yang, Fang Zu ^a   Luo, Ming Hui ^b   Tian, Zhong Qun ^a   Zhou, Shao Min ^a  

^a XIAMEN UNIVERSITY   (China)

^b XIAMEN UNIVERSITY   (China)

Author keywords

Citrate; Copper; Deposit characterization; Electrodeposition; Micro electro mechanical system; Planar inductor; References

Indexed keywords

EID: 77958030835     PISSN: 10006818     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

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