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Volumn 16, Issue 5, 2008, Pages 593-595

Time effect on resistivity and rigidity of electrodeposited copper

Author keywords

Electrodeposited copper; Resistivity; Rigidity; Time effect

Indexed keywords

COPPER; COPPER METALLOGRAPHY; CORROSION; CURRENT DENSITY; GRAIN SIZE AND SHAPE; MAGNETRONS; METALLIC FILMS; RIGIDITY;

EID: 57449119278     PISSN: 10050299     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (2)

References (12)
  • 2
  • 3
    • 0343081528 scopus 로고    scopus 로고
    • Influence of noncoherent nucleation on the formation of the polycrystalline structure of metals electrodeposited in the presence of surface-active agents
    • KOZLOV V M, BICELLI L P. Influence of noncoherent nucleation on the formation of the polycrystalline structure of metals electrodeposited in the presence of surface-active agents [J]. Materials Chemistry and Physics, 2000, 62 (1): 158-163.
    • (2000) Materials Chemistry and Physics , vol.62 , Issue.1 , pp. 158-163
    • Kozlov, V.M.1    Bicelli, L.P.2
  • 5
    • 57449115677 scopus 로고    scopus 로고
    • Chinese source
  • 7
    • 0036529467 scopus 로고    scopus 로고
    • Effects of the relationship between resistivity and additive chemistries in electrochemically deposited copper films
    • CHEN C, LIN K. Effects of the relationship between resistivity and additive chemistries in electrochemically deposited copper films [J]. Japanese Journal of Applied Physics, 2002, 41: 1981-1985.
    • (2002) Japanese Journal of Applied Physics , vol.41 , pp. 1981-1985
    • Chen, C.1    Lin, K.2
  • 8
    • 57449091998 scopus 로고    scopus 로고
    • Chinese source
  • 9
    • 4244101375 scopus 로고
    • Transmission electron-microscope observations of the structure of electrolytically deposited copper and its annealing behaviour
    • STOEBE T G, HAMMAD F H, RUDEE M L. Transmission electron-microscope observations of the structure of electrolytically deposited copper and its annealing behaviour [J]. Electrochim Acta, 1964, 9: 925.
    • (1964) Electrochim Acta , vol.9 , pp. 925
    • Stoebe, T.G.1    Hammad, F.H.2    Rudee, M.L.3
  • 11
    • 0141633952 scopus 로고    scopus 로고
    • Thermodynamics and kinetics of room-temperature microstructural evolution in copper films
    • DETAVERNIER C, ROSSNAGEL S, NOYAN C, et al. Thermodynamics and kinetics of room-temperature microstructural evolution in copper films [J]. Journal of Applied Physics, 2003, 94 (5): 2874-2881.
    • (2003) Journal of Applied Physics , vol.94 , Issue.5 , pp. 2874-2881
    • Detavernier, C.1    Rossnagel, S.2    Noyan, C.3
  • 12
    • 0033355380 scopus 로고    scopus 로고
    • Characterization of plated Cu thin film microstructures
    • GIGNAC L M, RODBELL K P, CABRAL C Jr, et al. Characterization of plated Cu thin film microstructures [J]. Mater Res Soc Symp Proc, 1999, 562: 209-214.
    • (1999) Mater Res Soc Symp Proc , vol.562 , pp. 209-214
    • Gignac, L.M.1    Rodbell, K.P.2    Cabral, Jr.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.