High Q multilayer spiral inductor on silicon chip for 5 ∼ 6 GHz

IEEE Electron Device Letters

Volumn 23, Issue 8, 2002, Pages 470-472

  Lihui, Guo ^a   Mingbin, Yu ^a   Zhen, Chen ^a   Han, He ^a   Yi, Zhang ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

CMOS interconnect technology; Multilayer spiral inductors; Wireless LAN

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROPROCESSOR CHIPS; NATURAL FREQUENCIES; SEMICONDUCTING SILICON; SILICA;

MULTILAYER SPIRAL INDUCTORS;

ELECTRIC INDUCTORS;

EID: 0036687251     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2002.801322     Document Type: Article

References (9)

1. RF on-chip passive components fabricated by CMOS compatible Cu interconnect technology
2. A 6.5 GHz monolithic CMOS voltage-controlled oscillator
3. A CMOS frequency synthesizer with an injection-locked frequency divider for a 5-GHz wireless LAN receiver
4. Modeling and analysis of multilevel spiral inductors for RFIC's
5. Performance limits of planar and multilayer integrated inductors
6. Multilevel-spiral inductors using VLSI interconnect technology
7. Stacked inductors and transformers in CMOS technology
8. Systematic analysis and modeling of integrated inductors and transformers in RF IC design