Anisotropy effects on the reliability of single-crystal silicon

Scripta Materialia

Volumn 63, Issue 10, 2010, Pages 997-1000

  Borrero López, Oscar ^a,b   Vodenitcharova, Tania ^b   Hoffman, Mark ^b  

^a UNIVERSITY OF EXTREMADURA   (Spain)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

Elemental semiconductors; Finite element analysis; Fracture; Scratch test

Indexed keywords

ANISOTROPY EFFECT; CLEAVAGE PLANE; CONE CRACK; CRACK ORIENTATIONS; CRYSTALLOGRAPHIC DIRECTIONS; ELEMENTAL SEMICONDUCTORS; FINITE ELEMENT ANALYSIS; PHASE ANALYSIS; SCRATCH TEST; SILICON-BASED DEVICES; SINGLE CRYSTAL SILICON;

ANISOTROPY; CRACKS; CRYSTALLOGRAPHY; FRACTURE; SINGLE CRYSTALS;

FINITE ELEMENT METHOD;

EID: 77957906743     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2010.07.024     Document Type: Article

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