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Volumn 19, Issue 2, 2004, Pages 657-660
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Strength of silicon containing nanoscale flaws
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRACK INITIATION;
DEGRADATION;
FUNCTIONS;
MICROELECTROMECHANICAL DEVICES;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
OPTICAL FIBERS;
STRESS CONCENTRATION;
NANOELECTROMECHANICAL SYSTEMS (NEMS);
NANOINDENTATION;
SILICON WAFERS;
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EID: 1842665127
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/jmr.2004.19.2.657 Document Type: Article |
Times cited : (14)
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References (28)
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