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Volumn 97, Issue 4, 2010, Pages
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Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances
a
CEA GRENOBLE
(France)
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTI-RESONANCE;
BULK-MODE;
FEED THROUGH;
HIGH FREQUENCY HF;
MICROELECTROMECHANICAL RESONATORS;
MICROMECHANICAL RESONATOR;
OUTPUT SIGNAL;
PARASITIC CAPACITANCE;
RESONANCE PEAK;
DISKS (MACHINE COMPONENTS);
DISKS (STRUCTURAL COMPONENTS);
RESONATORS;
CAPACITANCE;
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EID: 77955765513
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3472217 Document Type: Article |
Times cited : (28)
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References (8)
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