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Volumn 97, Issue 4, 2010, Pages

Efficient capacitive transduction of high-frequency micromechanical resonators by intrinsic cancellation of parasitic feedthrough capacitances

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-RESONANCE; BULK-MODE; FEED THROUGH; HIGH FREQUENCY HF; MICROELECTROMECHANICAL RESONATORS; MICROMECHANICAL RESONATOR; OUTPUT SIGNAL; PARASITIC CAPACITANCE; RESONANCE PEAK;

EID: 77955765513     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3472217     Document Type: Article
Times cited : (28)

References (8)
  • 2
    • 76449104416 scopus 로고    scopus 로고
    • APPLAB 0003-6951,. 10.1063/1.3309586
    • W. Xu, S. Choi, and J. Chae, Appl. Phys. Lett. APPLAB 0003-6951 96, 053703 (2010). 10.1063/1.3309586
    • (2010) Appl. Phys. Lett. , vol.96 , pp. 053703
    • Xu, W.1    Choi, S.2    Chae, J.3
  • 3
    • 34748920957 scopus 로고    scopus 로고
    • Micromechanical resonator with ultra-high quality factor
    • DOI 10.1049/el:20072424
    • M. Palaniapan and L. Khine, Electron. Lett. ELLEAK 0013-5194 43, 1090 (2007). 10.1049/el:20072424 (Pubitemid 47482850)
    • (2007) Electronics Letters , vol.43 , Issue.20 , pp. 1090-1092
    • Palaniapan, M.1    Khine, L.2
  • 4
    • 10944220857 scopus 로고    scopus 로고
    • VHF single crystal silicon capacitive elliptic bulk-mode disk resonators - Part II: Implementation and characterization
    • DOI 10.1109/JMEMS.2004.838383
    • S. Pourkamali, Z. Hao, and F. Ayazi, J. Microelectromech. Syst. JMIYET 1057-7157 13, 1054 (2004). 10.1109/JMEMS.2004.838383 (Pubitemid 40009506)
    • (2004) Journal of Microelectromechanical Systems , vol.13 , Issue.6 , pp. 1054-1062
    • Pourkamali, S.1    Hao, Z.2    Ayazi, F.3
  • 6
    • 0038493939 scopus 로고    scopus 로고
    • Proceedings of the 16th IEEE Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, January 19-23
    • M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen, " Stemless wine-glass-mode disk micromechanical resonators.," Proceedings of the 16th IEEE Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan, January 19-23, 2003, pp. 698-701.
    • (2003) Stemless Wine-glass-mode Disk Micromechanical Resonators , pp. 698-701
    • Abdelmoneum, M.A.1    Demirci, M.U.2    Nguyen, C.T.-C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.