Monolithically Integrated Double-Ended Tuning Fork- Based Oscillator with Low Bias Voltage in Air Conditions

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 614-617

  Lopez, J L ^a   Verd, J ^b   Marigo E ^a   Uranga, A ^a   Murillo, G ^a   Giner, J ^a   Torres, F ^a   Abadal, G ^a   Barniol, N ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b UNIVERSITAT DE LES ILLES BALEARS   (Spain)

Author keywords

CMOS; CMOS MEMS; MEMS; MEMS based oscillators; RF MEMS

Indexed keywords

AIR CONDITIONS; APPLIED VOLTAGES; CMOS; CMOS AMPLIFIERS; CMOS OSCILLATORS; CMOS TECHNOLOGY; CMOS-MEMS; DC BIAS VOLTAGE; DC BIASING; DC POLARIZATION; DC VOLTAGE; DOUBLE-ENDED TUNING FORKS; IN-VACUUM; LOW BIAS VOLTAGE; LOW VOLTAGES; MEMS RESONATORS; MONOLITHICALLY INTEGRATED; RF-MEMS; SELF - EXCITED; VACUUM CONDITION;

BIAS VOLTAGE; CMOS INTEGRATED CIRCUITS; MEMS; OSCILLATORS (ELECTRONIC); POLARIZATION; VACUUM;

MICROELECTROMECHANICAL DEVICES;

EID: 71549128034     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.153     Document Type: Conference Paper

References (6)

1. Huang W.-L., Ren Z., Lin Y.-W., Chen H.-Y., Lahann J., and Nguyen C.T.C. Fully monolithic CMOS nickel micromechanical resonator oscillator. MEMS (2008) 10-13
2. Y.W. Lin, S.S. Li, Z. Ren, C.T.C. Nguyen. "Low phase noise array-composite micromechanical wine-glass disk oscillator". IEDM'05.
3. Bontemps J.J.M., Murroni A., van Beek J.T.M., van den Homberg J.A.T.M., Koning J.J., Koops G.E.J., Verheijden G.J.A.M., et al. 56MHz piezoresistive micromechanical oscillator. Transducers (2009) 1433
4. Verd J., Uranga A., Abadal G., Teva J., Torres F., Lopez J.L., Perez-Murano F., Esteve J., and Barniol N. Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Atto-gram Range. EDL vol. 29 (2008) 146-148
5. J. L. Lopez, J. Verd, J. Teva, G. Murillo, J. Giner, F. Torres, A. Uranga, G. Abadal, and N. Barniol, "Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies," JMM vol. 19, p. 015002, 2009.
6. J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J. L. Lopez, J. Esteve, F. Perez-Murano, and N. Barniol, "From VHF to UHF CMOSMEMS monolithically integrated resonators," MEMS 2008.