Level set methods for the modelling of surface evolution in the abrasive jet micromachining of features used in MEMS and microfluidic devices

Journal of Micromechanics and Microengineering

Volumn 20, Issue 8, 2010, Pages

  Burzynski, T ^a   Papini, M ^a  

^a RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVE JET; COMPUTER MODELS; LEVEL SET; LEVEL SET METHOD; MACHINED SURFACE; MICRO-FLUIDIC DEVICES; NUMERICAL TECHNIQUES; PROFILE DEPTH; SURFACE EVOLUTION; TIME-DEPENDENT EVOLUTIONS;

BIOLOGY; DIFFERENTIAL EQUATIONS; DIFFERENTIATION (CALCULUS); DROP BREAKUP; LEVEL MEASUREMENT; MICROMACHINING;

ABRASIVES;

EID: 77957828581     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/8/085004     Document Type: Article

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