Three-dimensional simulation of powder blasting with a polymer mask using a cellular automaton

Journal of Micromechanics and Microengineering

Volumn 18, Issue 5, 2008, Pages

  Yagyu, Hiromasa ^a,b   Tabata, Osamu ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Limited   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; EROSION; SOLIDS;

POLYMER MASK; POWDER BLASTING;

GLASS;

EID: 42549137846     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/5/055010     Document Type: Article

References (11)

1. Schlautmann S, Wensink H, Schasfoort R B M, Elwenspoek M C and van den Berg A 2001 Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors J. Micromech. Microeng. 11 386-9
2. Yagyu H, Sugano K, Hayashi S and Tabata O 2005 Micropowder blasting with nanoparticles dispersed polymer mask for rapid prototyping of glass chip J. Micromech. Microeng. 15 1236-41
3. Belloy E, Sayah A and Gijs M A M 2002 Micromachining of glass inertial sensors J. Microelectromech. Syst. 11 85-90
4. Yagyu H, Hayashi S and Tabata O 2004 Application of nanoparticles dispersed polymer to micropowder blasting mask J. Microelectoromech. Syst. 13 1-6
5. Wensink H, Jansen H V, Berenschot J W and Elwenspoek M C 2000 Mask materials for powder blasting J. Micromech. Microeng. 10 175-80
6. Adalsteinsson D and Sethian J A 1995 A level set approach to a unified model for etching, deposition, and lithography II: three-dimensional simulations J. Comput. Phys. 122 348-66
7. Zhou Z F, Huang Q A, Li W H and Lu W 2007 A novel 3D dynamic cellular automata model for photoresist etching process simulation IEEE Trans. Computer-Aided Design Integrated Circuit Syst. 26 100-14
8. Yagyu H and Tabata O 2007 Cellular automaton simulation of micropowder blasting with mask erosion IEE J. Trans. Electrical and Electronic Eng. 2 348-56
9. Nielson J H and Gilchrist A 1968 Erosion by a stream of solid particles Wear 11 111-22
10. Slikkerveer P J, van Dongen M H A and Touwslager F J 1999 Erosion of electrometric protective coatings Wear 236 189-98
11. th Int. Conf. on Micro Electoro Mecanical Systems 'MEMS2007 (Kobe) pp 215-8