Surface evolution models for abrasive jet micromachining of holes in glass and polymethylmethacrylate (PMMA)

Journal of Micromechanics and Microengineering

Volumn 17, Issue 11, 2007, Pages 2175-2185

  Ghobeity, A ^a   Getu, H ^b   Papini, M ^a,b   Spelt, J K ^a,b  

^a UNIVERSITY OF TORONTO   (Canada)

^b RYERSON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BRITTLENESS; COMPUTER SIMULATION; GLASS; VISCOSITY;

ABRASIVE JET MICROMACHINING (AJM); MAXIMUM ERROR; SURFACE VELOCITY;

POLYMETHYL METHACRYLATES;

EID: 35648971163     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/11/003     Document Type: Article

References (32)

1. 2 laser Japan. J. Appl. Phys. 42 2881-6
2. Iliescu C, Chen B, Tay F E H, Xu G and Miao J 2003 Characterization of deep wet etching of glass Proc. SPIE 6037 60370A-2
3. Yang C T, Ho S S and Yan B H 2001 Micro hole machining of borosilicate glass through electro mechanical discharge machining Key Eng. Mater. 196 149-66
4. Schelautmann S, Wensink H, Schasfoort R, Elwenspoek M and Berg A V D 2001 Powder-blasting technology as an alternative tool for microfabrication of capillary electrophoresis chips with integrated conductivity sensors J. Micromech. Microeng. 11 386-9
5. Zhang L, Kuriyagawa T, Yasutomi Y and Zhao J 2005 Investigation into micro abrasive intermittent jet machining Int. J. Mach. Tools Manuf. 45 873-9
6. Tyrrell E, Gibson C, MacCraith B D, Gray D, Byrne P, Kent N, Burke C and Paull B 2004 Development of a micro-fluidic manifold for copper monitoring utilising chemiluminescence detection Lab Chip 4 384-90
7. Getu H, Ghobeity A, Spelt J K and Papini M 2007 Abrasive jet micromachining of polymethylmethacrylate Wear 263 1008-15
8. Ronggui S and Righini G C 1991 Characterization of reactive ion etching of glass and its applications in integrated optics J.Vac. Sci. Technol. A 9 2709-12
9. 6 plasma Sensors Actuators A 87 139-45
10. Tay F E H, Iliescu C, Jing J and Miao J 2006 Defect free wet etching through Pyrex glass using Cr/Au mask Microsyst. Technol. 12 987-92
11. Abgrall A and Gue A-M 2007 Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem-a review J. Micromech. Microeng. 17 R15-R49
12. Ghobeity A, Krajac T, Burzinski T, Papini M and Spelt J K 2006 Surface evolution models in abrasive jet micromachining Wear doi:10.1016/j.wear.2007.02. 020
13. Wensink H, Schlautmann S, Goedbloed M H and Elwenspoek M C 2002 Fine tuning the roughness of powder blasted surfaces J. Micromech. Microeng. 12 616-20
14. Belloy E, Sayah A and Gijs M A M 2002 Micromachining of glass inertial sensors J. Microelectromech. Syst. 11 85-90
15. Solignac D, Sayah A, Constantin S, Freitag R and Gijs M A M 2001 Powder blasting for the realization of microchips for bio-analytic applications Sensors Actuators 92 388-93
16. Belloy E, Pawlowski A G, Sayah A and Gijs M A M 2002 Microfabricationof high-aspect ratio and complex monolithic structures in glass J. Microelectromech. Syst. 11 521-6
17. Park D S, Cho M W and Seo T I 2005 Mechanical etching of micro pockets by powder blasting Int. J. Adv. Manuf. Technol. 25 1098-104
18. ten Thije Boonkkamp J H M and Jansen J K M 2002 An analytical solution for mechanical etching of glass by powder blasting J. Eng. Math. 43 385-99
19. ten Thije Boonkkamp J H M and Slikkerveer P J 2002 Mathematical modelling of erosion by powder blasting Surv. Math. Ind. 10 89-105
20. Slikkerveer P J and in't Veld F H 1999 Model for patterned erosion Wear 233-235 377-86
21. Ghobeity A, Papini M and Spelt J K 2007 Computer simulation of particle interference in abrasive jet micromachining Wear 263 265-9
22. Ghobeity A, Getu H, Krajac T, Spelt J K and Papini M 2007 Process repeatability of abrasive jet micromachining J. Mater. Process. Technol. 190 51-60
23. Ciampini D, Spelt J K and Papini M 2003 Simulation of interference effects in particle streams following impact with a flat surface: Part II. Parametric study and implications for erosion testing and blast cleaning Wear 254 250-64
24. Finnie I 1960 Erosion of surfaces by solid particles Wear 3 87-103
25. Slikkerveer P J, Bouten P C P, in't Veld F H and Scholten H 1998 Erosion and damage by sharp particles Wear 217 237-50
26. Bitter J G A 1986 A study of erosion phenomena: Part I Wear 6 5-21
27. Bitter J G A 1986 A study of erosion phenomena: Part II Wear 8 169-90
28. Sethian J A 1997 Level set methods J. Fluid Mech. 345 412
29. Osher S and Sethian J A 1988 Fronts propagating with curvature-dependent speed-algorithm based on Hamilton-Jacobi formulation J. Comput. Phys. 79 12-49
30. Moktadir Z, Wensink H and Kraft M 2005 Analytical model of micromachining of brittle materials with sharp particles Microelectron. J. 36 608-11
31. Oka Y I, Ohnogi H, Hosokawa T and Matsumura M 1997 The impact angle dependence of erosion damage caused by solid particle impact Wear 203-204 573-9
32. Getu H, Ghobeity A, Spelt J K and Papini M 2007 Abrasive jet micro-machining of acrylic polymers Wear submitted