Cryogenically assisted abrasive jet micromachining of polymers

Journal of Micromechanics and Microengineering

Volumn 18, Issue 11, 2008, Pages

  Getu, H ^a   Spelt, J K ^b   Papini, M ^a  

^a RYERSON UNIVERSITY   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ABRASIVES; BUTADIENE; COMPOSITE MICROMECHANICS; COOLING; EROSION; JETS; LIQUEFIED GASES; LIQUID NITROGEN; MACHINING; MICROCHANNELS; MICROMACHINING; NITROGEN REMOVAL; POLYMERS; SILICONES; SOIL MECHANICS; STYRENE;

ABRASIVE JETS; ACRYLONITRILE BUTADIENE STYRENES; CRYOGENIC TEMPERATURES; EROSION RATE MEASUREMENTS; EROSION RATES; IMPACT ANGLES; MATERIAL REMOVAL RATES; MICROMACHINED; POLYMERIC MATERIALS; ROOM TEMPERATURES;

ABS RESINS;

EID: 58149352282     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/11/115010     Document Type: Article

References (30)

1. Solignac D, Sayah A, Constantin S, Freitag R and M Giijs M A 2001 Powder blasting for realization of microchips for bio-analytic applications Sensors Actuators A 92 388-93
2. Liu C, Chen J, Engel J, Zou J, Wang X, Fan Z, Ryu K, Shaikh K and Bullen D 2003 Polymer micromachining and applications in sensors, microfluidics, and nanotechnology 226th National Meeting of the American Chemical Society (ACS) 2003 (New York, September 11-17)
3. Mills C A, Martinez E, Bessueille F, Villanueva G, Bausells J, Samitier J and Errachid A 2005 Production of structures for microfluidics using polymer imprint techniques Microelectron. Eng. 78-9 695-700
4. Holger B and Laurie E L 2002 Polymer microfluidic devices Talanta 56 267-87
5. Lai S, Lee L J, Yu L, Koelling K W and Madou M J 2002 Micro- and nano-fabrication of polymer based microfluidic platforms for bioMEMS applications Proc. Materials Research Society Symp. vol 729 (U1.7.1-U1.7.11)
6. Getu H, Ghobeity A, Spelt J K and Papini M 2007 Abrasive jet micromachining of polymethylmethacrylate Wear 263 1008-15
7. Getu H, Ghobeity A, Spelt J K and Papini M Abrasive jet micromachining of acrylic and polycarbonate polymers at oblique angles of attack Wear doi:10.1016/j.wear.2008.01.013
8. de Jong J, Ankone B, Lammertink R G H and Wessling M 2005 New replication technique for the fabrication of thin polymeric microfluidic devices with tunable porosity Lab Chip 5 1240-7
9. Zhang C, Yang C and Ding D 2004 Deep reactive ion etching of PMMA Appl. Surf. Sci. 227 139-43
10. Hsieh S S, Kuo J-K, Hwang C-F and Tsai H-H 2004 A novel design and micro-fabrication for a micro PEMFC Microsyst. Technol. 10 121-6
11. Brown N and Parrish M 1972 Effect of liquid nitrogen on the tensile strength of polyethylene and polytetrafluroethylene Polym. Lett. Edn. 10 777-9
12. Beardmore P and Rabinowitz S 1971 Low temperature crazing in amorphous polymers J. Mater. Sci. 6 80-5
13. Mizutani K 1987 Temperature dependence of fracture toughness of poly(methyl methacrylate) J. Mater. Sci. Lett. 6 915-6
14. Dhar N R, Paul S and Chattopadhyay A B 2002 Role of cryogenic cooling on cutting temperature in turning steel J. Manuf. Sci. Eng. 124 146-54
15. Venugopal K A, Paul S and Chattopadhyay A B 2007 Tool wear in cryogenic turning of Ti-6Al-4V alloy Cryogenics 47 12-8
16. Muju M K and Pathak A K 1998 Abrasive jet machining of glass at low temperature J. Mech. Work. Technol. 17 325-32
17. Weston D P, Shipway P H and Harris S J 2005 Coating removal from an industrial polypropylene blend by cryogenic blasting: the development of substrate damage Wear 258 392-401
18. Spur G, Uhlmann E and Elbing F 1999 Dry-ice blasting for cleaning: process, optimization and application Wear 233-4 402
19. Brewis D M, Critchlow G W and Curtis C A 1999 Cryoblasting as a pretreatment to enhance adhesion to aluminium alloys: an initial study Int. J. Adhes. Adhes. 19 253-6
20. Oka Y I, Ohnogi H, Hosokawa T and Matsumura M 1997 The impact angle dependence of erosion damage caused by solid particle impact Wear 203-4 573-9
21. Ghobeity A, Getu H, Krajac T, Spelt J K and Papini M 2007 Process repeatability in abrasive jet micromachining J. Mater. Process. Technol. 190 51-60
22. Bachalo W D and Houser M J 1984 Phase Doppler spray analyzer for simultaneous measurements of drop size and velocity distributions Opt. Eng. 23 583-90
23. Rao P V, Young S G and Buckley D H Solid spherical glass particle impingement studies of plastic materials 1983 NASA Tech. Paper 2161 (National Aeronautics and Space Administration)
24. Walley S M and Field J E 1987 The erosion and deformation of polyethylene by solid-particle impact Phil. Trans. R. Soc. Lond. A 321 277-303
25. Miyazaki N and Takeda N 1993 Solid particle erosion of fiber reinforced plastics J. Comp. Mater. 27 21-31
26. Arjula S, Harsha A P and Ghosh M K 2008 Solid-particle erosion behavior of high-performance thermoplastic polymers J. Mater. Sci. 43 1757-68
27. Neilson J H and Gilchrist A 1968 Erosion by a stream of solid particles Wear 11 111-22
28. Tilly G P and Wendy Sage 1970 The interaction of particle and material behavior in erosion process Wear 16 447-65
29. Ghobeity A, Krajac T, Burzynski T, Papini M and Spelt J K 2008 Surface evolution models in abrasive jet micromachining Wear 264 185-98
30. Ghobeity A, Getu H, Papini M and Spelt J K 2007 Abrasive jet micro-machining of glass and polymethylmethacrylate: surface evolution models 5th Canadian Workshop on MEMS and Microfluidics (CWMEMS 2007) (Montreal, Canada, August 12-13 2007)