Microfabrication of high-aspect ratio and complex monolithic structures in glass

Journal of Microelectromechanical Systems

Volumn 11, Issue 5, 2002, Pages 521-527

  Belloy, Eric ^a   Pawlowski, Anne Gabrielle ^a   Sayah, Abdeljalil ^a   Gijs, Martin A M ^a  

^a EPFL   (Switzerland)

Author keywords

Ceramics; Erosion; Glass; High aspect ratio; Microfabrication; Monolithic; Powder blasting; Suspended microstructure

Indexed keywords

ASPECT RATIO; CERAMIC MATERIALS; GLASS; MASKS; MONOLITHIC INTEGRATED CIRCUITS;

MICROFABRICATION; SUSPENDED MICROSTRUCTURE;

MICROELECTROMECHANICAL DEVICES;

EID: 0036772143     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2002.803418     Document Type: Article

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