Oblique powder blasting for three-dimensional micromachining of brittle materials

Sensors and Actuators, A: Physical

Volumn 92, Issue 1-3, 2001, Pages 358-363

  Belloy, E ^a   Sayah, A ^a   Gijs, M A M ^a  

^a EPFL   (Switzerland)

Author keywords

Erosion; Etching; Microfabrication; Powder blasting; Sand blasting

Indexed keywords

ALUMINA; BLASTING; BRITTLENESS; EROSION; ETCHING; MICROMACHINING; NUMERICAL METHODS; PARTICLES (PARTICULATE MATTER); POWDERS; SUBSTRATES;

FLOATGLASS SUBSTRATES; MASK UNDERETCHING PHENOMENA; MICROFABRICATION PROCESS; OBLIQUE POWDER BLASTING; PRESSURIZED AIR BEAM; SAND BLASTING; THREE DIMENSIONAL MICROMACHINING;

MICROELECTRONIC PROCESSING;

EID: 0035425693     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00572-6     Document Type: Article

References (6)

1. Erosion and damage by sharp particles
2. Mechanical etching of glass by powder blasting
3. Powder blasting as a new technology for inertial sensor fabrication
4. The introduction of powder blasting for sensors and microsystem applications
5. High resolution powder blast micromachining
6. Powder blasting for three-dimensional microstructuring of glass