Tunable surface texturing by polarization-controlled three-beam interference

Journal of Micromechanics and Microengineering

Volumn 20, Issue 9, 2010, Pages

  Huang, Jintang ^a,b   Beckemper, Stefan ^a   Gillner, Arnold ^a   Wang, Keyi ^b  

^a FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

^b UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM INTERFERENCE; HEXAGONAL SYMMETRY; HIGH-PRECISION; INTENSITY DISTRIBUTION; INTENSITY PATTERNS; INTERFERING BEAMS; MICRO-BUMPS; MULTIBEAM INTERFERENCES; MULTIPLE LASERS; OPTICAL SET-UP; OVERLAPPED AREA; PERIODIC MICROSTRUCTURE; POLARIZATION-CONTROLLED; SURFACE STRUCTURING; SURFACE TEXTURES; SURFACE-TEXTURING;

LASER THEORY; MICROSTRUCTURE; POLYIMIDES;

POLARIZATION;

EID: 77957780931     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/9/095004     Document Type: Article

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