Microstructure and optical properties of TiO2 thin films deposited at different oxygen flow rates

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 20, Issue 8, 2010, Pages 1429-1433

  Zhao, Bao Xing ^a   Zhou, Ji Cheng ^a   Rong, Lin Yan ^a  

^a CENTRAL SOUTH UNIVERSITY   (China)

Author keywords

anti reflection coating; reactive magnetron sputtering; solar cell; TiO2 film

Indexed keywords

AFM; ANGLE SHIFTS; ANTI-REFLECTION; BAND GAPS; INFLUENCE OF OXYGEN; NANO-CRYSTALLINE STRUCTURES; OXYGEN FLOW RATES; REACTIVE MAGNETRON SPUTTERING; STRUCTURAL AND OPTICAL PROPERTIES; STRUCTURE SYSTEMS; TIO; X RAY DIFFRACTOMETRY;

COATINGS; MAGNETRON SPUTTERING; MICROSTRUCTURE; OXYGEN; SOLAR CELLS; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

OPTICAL PROPERTIES;

EID: 77957705095     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(09)60316-2     Document Type: Article

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