Aerosol synthesis of silicon nanoparticles with narrow size distribution-Part 1: Experimental investigations

Journal of Aerosol Science

Volumn 41, Issue 11, 2010, Pages 998-1007

  Kormer R ^a   Jank, M P M ^b   Ryssel, H ^b   Schmid, H J ^c   Peukert, W ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^c UNIVERSITY OF PADERBORN   (Germany)

Author keywords

Aerosol synthesis; Hot wall reactor; Monodisperse; Nanoparticles; Silicon

Indexed keywords

AEROSOLS; NANOPARTICLES; PARTICLE SIZE; PYROLYSIS; RESIDENCE TIME DISTRIBUTION; SILICON; SIZE DISTRIBUTION; STATISTICS;

AEROSOL SYNTHESIS; EXPERIMENTAL INVESTIGATIONS; GEOMETRIC STANDARD DEVIATIONS; HOT-WALL REACTORS; MONO-DISPERSE; NARROW SIZE DISTRIBUTIONS; PRECURSOR CONCENTRATION; SILANE PARTIAL PRESSURE;

SYNTHESIS (CHEMICAL);

NANOPARTICLE; SILICON;

AEROSOL COMPOSITION; AGGLOMERATION; EXPERIMENTAL STUDY; PARTICLE SIZE; PYROLYSIS; SILICON; SIZE DISTRIBUTION; TEMPERATURE GRADIENT; THERMAL DECOMPOSITION;

AEROSOL; ARTICLE; PARTICLE SIZE; PRIORITY JOURNAL; PYROLYSIS; SYNTHESIS; TEMPERATURE;

EID: 77957355408     PISSN: 00218502     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jaerosci.2010.05.007     Document Type: Article

References (29)

1. Bapat A., Perrey C.R., Campbell S.A., Carter C.B., Kortshagen U. Synthesis of highly oriented, single-crystal silicon nanoparticles in a low-pressure, inductively coupled plasma. Journal of Applied Physics 2003, 94:1969-1974.
2. Dekkers P.J., Friedlander S.K. The self-preserving size distribution theory: I. Effects of the knudsen number on aerosol agglomerate growth. Journal of Colloid and Interface Science 2002, 248:295-305.
3. Fernández de la Mora J., Rao N., McMurry P.H. Inertial impaction of fine particles at moderate Reynolds numbers and in the transonic regime with a thin-plate orifice nozzle. Journal of Aerosol Science 1990, 21:889-909.
4. Holm J., Roberts J.T. Thermal oxidation of 6nm aerosolized silicon nanoparticles: Size and surface chemistry changes. Langmuir 2007, 23:11217-11224.
5. Holm J., Roberts J.T. Surface chemistry of aerosolized silicon nanoparticles: Evolution and desorption of hydrogen from 6-nm diameter particles. Journal of the American Chemical Society 2007, 129:2496-2503.
6. Kasper G., Berner A. Ein Generator zur Erzeugung extrem monodisperser Kochsalz-Aerosole. Staub, Reinhaltung der 1978, 38:183-186.
7. Kirchhof M.J., Schmid H.-J., Peukert W. Reactor system for the study of high-temperature short-time sintering of nanoparticles. Review of Scientific Instruments 2004, 75:4833-4840.
8. Knipping J., Wiggers H., Rellinghaus B., Roth P., Konjhodzic D., Meier C. Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor. Journal of Nanoscience and Nanotechnology 2004, 4:1039-1044.
9. Kortshagen U., Mangolini L., Bapat A. Plasma synthesis of semiconductor nanocrystals for nanoelectronics and luminescence applications. Journal of Nanoparticle Research 2007, 9:39-52.
10. Kortshagen U. Nonthermal plasma synthesis of semiconductor nanocrystals. Journal of Physics D: Applied Physics 2009, 42:113001.
11. Kravets V.G., Meier C., Konjhodzic D., Lorke A., Wiggers H. Infrared properties of silicon nanoparticles. Journal of Applied Physics 2005, 97:84305-84306.
12. Körmer, R., Schmid, H. J., & Peukert, W. Aerosol synthesis of silicon nanoparticles with narrow size distribution - part 2: Theoretical analysis of the formation mechanism. Journal of Aerosol Science, this issue, doi:. http://10.1016/j.jaerosci.2010.08.002.
13. Li X., He Y., Talukdar S.S., Swihart M.T. Process for preparing macroscopic quantities of brightly photoluminescent silicon nanoparticles with emission spanning the visible spectrum. Langmuir 2003, 19:8490-8496.
14. Li X., He Y., Swihart M.T. Surface functionalization of silicon nanoparticles produced by laser-driven pyrolysis of silane followed by HF-HNO3 etching. Langmuir 2004, 20:4720-4727.
15. Li Z.F., Swihart M.T., Ruckenstein E. Luminescent silicon nanoparticles capped by conductive polyaniline through the self-assembly method. Langmuir 2004, 20:1963-1971.
16. Mangolini L., Kortshagen U. Plasma-assisted synthesis of silicon nanocrystal inks. Advanced Materials 2007, 19:2513-2519.
17. Meier C., Lüttjohann S., Kravets V.G., Nienhaus H., Lorke A., Wiggers H. Raman properties of silicon nanoparticles. Physica E: Low-dimensional Systems and Nanostructures 2006, 32:155-158.
18. Meier C., Gondorf A., Luttjohann S., Lorke A., Wiggers H. Silicon nanoparticles: Absorption, emission, and the nature of the electronic bandgap. Journal of Applied Physics 2007, 101:103112-103118.
19. Onischuk A.A., Levykin A.I., Strunin V.P., Sabelfeld K.K., Panfilov V.N. Aggregate formation under homogeneous silane thermal decomposition. Journal of Aerosol Science 2000, 31:1263-1281.
20. Rietveld H. A profile refinement method for nuclear and magnetic structures. Journal of Applied Crystallography 1969, 2:65-71.
21. Rübel H., SchrÖder B., Fuhs W., Krauskopf J., Rupp T., Bethge K. IR spectroscopy and structure of RF magnetron sputtered a-SiC:H films. Physica Status Solidi (b) 1987, 139:131-143.
22. Scriba M.R., Arendse C., Härting M., Britton D.T. Hot-wire synthesis of Si nanoparticles. Thin Solid Films 2008, 516:844-846.
23. Shen Z., Kim T., Kortshagen U., McMurry P.H., Campbell S.A. Formation of highly uniform silicon nanoparticles in high density silane plasmas. Journal of Applied Physics 2003, 94:2277-2283.
24. Stelzner T., Andra G., Wendler E., Wesch W., Scholz R., Gosele U., et al. Growth of silicon nanowires by chemical vapour deposition on gold implanted silicon substrates. Nanotechnology 2006, 17:2895-2898.
25. Sun Y., Xia Y. Shape-controlled synthesis of gold and silver nanoparticles. Science 2002, 298:2176-2179.
26. Tsantilis S., Pratsinis S.E. Narrowing the size distribution of aerosol-made titania by surface growth and coagulation. Journal of Aerosol Science 2004, 35:405-420.
27. Veinot J.G.C. Synthesis, surface functionalization, and properties of freestanding silicon nanocrystals. Chemical Communications 2006, 4160-4168.
28. Wiggers H., Starke R., Roth P. Silicon particle formation by pyrolysis of silane in a hot wall gasphase reactor. Chemical Engineering & Technology 2001, 24:261-264.
29. Yu W.W., Wang Y.A., Peng X. Formation and stability of size-, shape-, and structure-controlled CdTe nanocrystals: Ligand effects on monomers and nanocrystals. Chemistry of Materials 2003, 15:4300-4308.