Silicon particle formation by pyrolysis of silane in a hot wall gasphase reactor

Chemical Engineering and Technology

Volumn 24, Issue 3, 2001, Pages 261-264

  Wiggers, H ^a   Starke, R ^a   Roth, Paul ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; ARGON; ELECTRON MICROSCOPY; INFRARED SPECTROSCOPY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PYROLYSIS; SILANES; SILICON; X RAY DIFFRACTION ANALYSIS;

HOT WALL GASPHASE REACTORS;

CHEMICAL ENGINEERING;

ARGON; PYROLYSIS; SILICON;

EID: 0035277443     PISSN: 09307516     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4125(200103)24:3<261::AID-CEAT261>3.0.CO;2-K     Document Type: Article

References (11)

1. Canham, L. T., Appl. Phys. Lett. 57 (1990) pp. 1048-1048.
2. van Buuren, T.; Dinh, L. N.; Chase, L. L.; Siekhaus, W.J.; Terminello, L. J., Phys. Rev. Lett. 80 (1998) No. 17, pp. 3803-3806.
3. Fojtik, A.; Giersig, M.; Henglein, A., Ber. Bunsenges. Phys. Chem. 97 (1993) pp. 1493-1496.
4. Hofmeister, H.; Ködderitzsch, P.; Dutta, J., J. Non-Cryst. Solids 232-234 (1998) pp. 182-187.
5. Pauthe, M.; Bernstein, E.; Dumas, J.; Saviot, L.; Pradel, A.; Ribes, M., J. Mater. Chem. 9 (1999) pp. 187-191.
6. Yang, C.-S.; Bley, R. A.; Kauzlarich, S. M.; Lee, H. W. H.; Delgado G. R., J. Am. Chem. Soc. 121 (1999) pp. 5191-5195.
7. Li, Y.-L.; Liang, Y.; Xiao, K.-S.; Zheng, F.; Hu, Z.-Q., Nanostruct. Mater. 5 (1995) No. 1, pp. 1-9.
8. Maurits, J., Polycrystalline Silicon - Worlddemand and Supply, Advanced Silicon Material Inc. (1998), pp. 10-17
9. Lutwack, R., Flat-Plate Solar Array Project Final Report, JPL Publication 86-31, Pasadena 1986.
10. Bossel, C.; Dutta, J.; Houriet, R.; Hilborn, J.; Hofmann, H.; Mat. Sci. Eng. A204 (1995) pp. 107-112.
11. Onischuk, A. A.; Strunin, V. P.; Samoilova, R.; Nosov, A. V.; Ushakova, M. A.; Panfilov, V. N., J. Aerosol Sci. 28 (1997) No. 8, pp. 1425-1441.